H01J 37/1478
Beam tilting means, i.e. for stereoscopy or for beam channelling
Official title: {Beam tilting means, i.e. for stereoscopy or for beam channelling}
H01J37/1478 (Beam tilting means, i.e. for stereoscopy or for beam channelling) appears on 93 US grants and 104 published applications in this corpus.
Search patents in H01J- Granted patents
- 93
- Published applications
- 104
- Assignees
- 39
- Inventors
- 229
- Latest grant
- 25 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
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| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
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| 1983 | 0 | 0 |
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| 1985 | 0 | 0 |
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| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 1 | 0 |
| 2003 | 1 | 2 |
| 2004 | 2 | 0 |
| 2005 | 0 | 1 |
| 2006 | 1 | 5 |
| 2007 | 1 | 3 |
| 2008 | 6 | 2 |
| 2009 | 1 | 1 |
| 2010 | 2 | 0 |
| 2011 | 2 | 2 |
| 2012 | 2 | 6 |
| 2013 | 2 | 2 |
| 2014 | 5 | 4 |
| 2015 | 3 | 5 |
| 2016 | 5 | 5 |
| 2017 | 4 | 6 |
| 2018 | 4 | 2 |
| 2019 | 5 | 5 |
| 2020 | 5 | 12 |
| 2021 | 6 | 9 |
| 2022 | 6 | 5 |
| 2023 | 7 | 12 |
| 2024 | 11 | 8 |
| 2025 | 6 | 5 |
| 2026 | 4 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
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- Protecting a detector while discharging a region of a sample9 Oct 2025US 2025/0316439 A1Applied Materials Israel Ltd.
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Most cited
By later US patents
- Charged particle beam column47US 6,614,026 B1APPLIED Materials.Inc. · 2003
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- Column for charged particle beam device31US 6,452,175 B1APPLIED Materials.Inc. · 2002
- Charged particle beam apparatus and method for inspecting samples19US 6,674,075 B2APPLIED Materials.Inc. · 2004
- Charged particle beam column16US 7,223,983 B2Hitachi High-Technologies Corporation · 2007