Charged particle beam apparatus

A charged particle beam apparatus configured to measure a sample by irradiating the sample with a charged particle beam, the charged particle beam apparatus characterized by comprising:

• a storage device configured to store a correction value table corresponding to a recipe;
• and
• a computer system configured to execute measurement on a plurality of measurement points of the sample according to a measurement order determined in the recipe,
• wherein the computer system
• stores, when executing the recipe on a first sample, an adjustment result of one or more imaging conditions in the correction value table at each of a plurality of measurement points of the first sample, and
• adjusts, when executing the recipe on a second sample different from the first sample, the imaging condition based on the adjustment result of the one or more imaging conditions stored in the correction value table at each of the plurality of measurement points;
• wherein the computer system stores, when executing the recipe on the first sample, a correction value of focus of the charged particle beam at the plurality of measurement points in the correction value table, and
• wherein the computer system adjusts, when executing the recipe on the second sample, the focus of the charged particle beam based on the correction value of the focus stored in the correction value table;
• and
• wherein the computer system calculates a second correction term for the correction value of the focus based on a temperature change from start of execution of the recipe stored in the correction value table, and executes focus adjustment based on the second correction term.

A method of measuring a sample, using a charged particle beam device, by irradiating the sample with a charged particle beam, the method comprising:

• storing a correction value table corresponding to a recipe;
• and
• executing, via a computer system configured to execute measurement on a plurality of measurement points of the sample according to a measurement order determined in the recipe,
• wherein storing the correction value table stores, when executing the recipe on a first sample, an adjustment result of one or more imaging conditions in the correction value table at each of a plurality of measurement points of the first sample, and
• adjusts, when executing the recipe on a second sample different from the first sample, the imaging condition based on the adjustment result of the one or more imaging conditions stored in the correction value table at each of the plurality of measurement points;
• wherein the computer system stores, when executing the recipe on the first sample, a correction value of focus of the charged particle beam at the plurality of measurement points in the correction value table, and
• wherein the computer system adjusts, when executing the recipe on the second sample, the focus of the charged particle beam based on the correction value of the focus stored in the correction value table;
• and
• wherein the computer system calculates a first correction term for the correction value of the focus based on an elapsed time from start of execution of the recipe stored in the correction value table, and executes focus adjustment based on the first correction term.