Ion angle sensor
AssigneeApplied Materials, Inc.
InventorChuang-Chia Lin
Life of this patent
Estimating the term…
Abstract
Embodiments disclosed herein include an apparatus for measuring ion angles. In an embodiment, the apparatus comprises a first plate with an array of first openings, where the first plate is electrically conductive, and a second plate with an array of second openings below the first plate, where the second plate is electrically conductive. In an embodiment, an actuator is coupled to the first plate or the second plate, where the actuator is configured to displace one of the first plate or the second plate. In an embodiment, a third plate is below the second plate, where the third plate is electrically conductive.
Claims20
An apparatus, comprising:
- a first plate with an array of first openings, wherein the first plate is electrically conductive;
- a second plate with an array of second openings below the first plate, wherein the second plate is electrically conductive;
- an actuator coupled to the first plate or the second plate, wherein the actuator is configured to displace one of the first plate or the second plate;
- and
- a third plate below the second plate, wherein the third plate is electrically conductive.
An apparatus, comprising:
- a substrate;
- and
- a sensor on the substrate, wherein the sensor comprises:
- a collector plate;
- a first plate with first openings over the collector, wherein the first plate is configured to be displaced in a plane substantially parallel to a top surface of the collector plate;
- and
- a second plate with second openings over the first plate.
An apparatus, comprising:
- a substrate;
- a plurality of sensors distributed across a surface of the substrate, wherein each sensor comprises:
- a collector, wherein the collector is configured to measure a current induced by ions that collide with the collector;
- and
- an ion filter over the collector, wherein the ion filter comprises:
- a first plate with first openings;
- and
- a second plate with second openings over the first plate, wherein one or both of the first plate and the second plate are displaceable in a plane substantially parallel to a top surface of the collector plate.
Dependencies are inferred from the claim text.