Method for the automated mechanical adjustment of a particle beam column, associated computer program product and particle beam column

A method for mechanically adjusting of a particle beam column, the particle beam column comprising:

• a beam generator comprising a particle source and an extractor stop to generate a particle beam comprising charged particles;
• an anode stop;
• a condenser lens system to bundle the particle beam;
• a condenser stop to shape the particle beam;
• a first deflection unit to deflect the particle beam, the first deflection unit between the anode stop and the condenser stop in relation to a particle-optical beam path of the particle beam column;
• an objective lens system to focus the particle beam onto an object, interaction particles arising when the particle beam interacts with the object;
• a detection system to detect the interaction particles;
• and a controller to control the particle beam column, wherein the method comprises for a plurality of anode stop positions and a plurality of condenser stop positions:
• a) positioning the anode stop in an anode stop position using an electrically driveable mechanical anode stop adjustment mechanism;
• b) positioning the condenser stop in a condenser stop position using an electrically driveable mechanical condenser stop adjustment mechanism;
• c) scanning the condenser stop with the particle beam using the first deflection mechanism and generating a raster image of the condenser stop using the detection system;
• d) analysing the raster image with regard to the intensity and shape of the condenser aperture imaged thereon;
• e) determining a best raster image based on the d);
• and
• f) positioning the anode stop in a first position using of the electrically driveable mechanical anode stop adjustment mechanism and positioning the condenser stop in a second position using the electrically driveable mechanical condenser stop adjustment mechanism, wherein the first and second positions correspond to the positions of the anode stop and the condenser stop, respectively, in which the best raster image was recorded.

A method for mechanical adjustment of a particle beam column, wherein the particle beam column comprises:

• a beam generator comprising a particle source and an extractor stop to generate a particle beam comprising charged particles;
• an anode stop;
• a condenser lens system to bundle the particle beam, the condenser lens comprising first and second condenser lenses, the first condenser lens comprising first and second pole shoes, the first condenser lens being before the second condenser lens along a particle-optical beam path of the particle beam column;
• a condenser stop to shape the particle beam, the condenser stop being between the first and the second condenser lens;
• an objective lens system to focus the particle beam onto an object, interaction particles arising when the particle beam interacts with the object;
• a scanning device to deflect the particle beam and to scan the object, the scanning device being after the condenser stop along the particle-optical beam path;
• a detection system to detect the interaction particles;
• and a controller to controll the particle beam column, wherein the method comprises:
• a) positioning the first condenser lens in a condenser lens position;
• b) exciting the first condenser lens using a first weak excitation strength and wobbling the condenser lens excitation or wobbling an acceleration voltage of the beam generator;
• c) generating multiple raster images using the detection system during wobbling, for each raster image, the particle beam being raster-scanned over the object using the scanning device;
• d) determining a displacement of the emission spot imaged in the raster images during wobbling;
• e) repeating b) to d) and, during this, varying a position of only the first pole shoe of the first condenser lens using an electrically driveable mechanical first pole shoe adjustment mechanism;
• f) ascertaining a position of the first pole shoe in which a displacement of the emission spot in the raster images is reduced;
• and
• g) positioning only the first pole shoe in the position ascertained in f) using the electrically driveable mechanical first pole shoe adjustment mechanism.