G03F 7/70758
Drive means
Official title: {Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving}
G03F7/70758 (Drive means) appears on 594 US grants and 665 published applications in this corpus.
Search patents in G03F- Granted patents
- 594
- Published applications
- 665
- Assignees
- 125
- Inventors
- 888
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1985 | 3 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 3 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 4 | 0 |
| 1998 | 3 | 0 |
| 1999 | 3 | 0 |
| 2000 | 13 | 0 |
| 2001 | 11 | 9 |
| 2002 | 29 | 20 |
| 2003 | 12 | 26 |
| 2004 | 24 | 43 |
| 2005 | 34 | 58 |
| 2006 | 33 | 35 |
| 2007 | 25 | 21 |
| 2008 | 28 | 39 |
| 2009 | 18 | 32 |
| 2010 | 15 | 29 |
| 2011 | 26 | 26 |
| 2012 | 16 | 23 |
| 2013 | 23 | 25 |
| 2014 | 28 | 13 |
| 2015 | 30 | 35 |
| 2016 | 22 | 16 |
| 2017 | 25 | 18 |
| 2018 | 33 | 28 |
| 2019 | 31 | 28 |
| 2020 | 22 | 22 |
| 2021 | 15 | 20 |
| 2022 | 15 | 13 |
| 2023 | 10 | 17 |
| 2024 | 9 | 28 |
| 2025 | 14 | 18 |
| 2026 | 15 | 23 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Screw transmission drive, and reticle stage and measuring device for semiconductor lithography applications6 Oct 2026US 12,754,486 B2Carl Zeiss SMT GmbH
- Imprinting apparatus15 Sep 2026US 12,736,872 B2Koninklijke Philips N. V.
- Active linear motor parasitic force compensation25 Aug 2026US 12,717,250 B2APPLIED Materials.Inc.
- Positioning system18 Aug 2026US 12,710,438 B2Applied Materials Israel Ltd.
- Substrate holding apparatus, substrate processing apparatus, separation method, and article manufacturing method18 Aug 2026US 12,710,700 B2Canon Kabushiki Kaisha
- A positioning system for positioning an object within an xyz-system of coordinates1 Oct 2026US 2026/0295859 A1Vdl Enabling Technologies Group B.V.
- System and method for tailoring chuck stiffness1 Oct 2026US 2026/0299437 A1ASML Netherlands B. V.
- Substrate holding apparatus, substrate processing apparatus, separation method, and article manufacturing method1 Oct 2026US 2026/0299438 A1Canon Kabushiki Kaisha
- Internally-cooled actuator coil24 Sep 2026US 2026/0290679 A1ASML Netherlands B. V.
- Actuator, stage apparatus, lithography apparatus and article manufacturing method17 Sep 2026US 2026/0277122 A1Canon Kabushiki Kaisha
Most cited
By later US patents
- Stage device with frame-shaped member movable in at least three degrees of freedom within a two-dimensional plane560US 7,489,389 B2Nikon Corporation · 2009
- Magnetically positioned X-Y stage having six degrees of freedom181US 6,072,251 AUltratech Stepper, Inc. · 2000
- Magnetic arrays171US 5,631,618 AMassachusetts Institute of Technology · 1997
- Stage device and exposure apparatus157US 6,417,914 B1Nikon Corporation · 2002
- Two-dimensional precise positioning device for use in a semiconductor manufacturing apparatus155US 4,535,278 ATelmec Co., Ltd. · 1985