Active linear motor parasitic force compensation

A digital lithography system, comprising:

• a slab;
• a stage disposed over the slab, the stage configured to support a substrate, the stage comprising a pair of protrusions that are disposed adjacent to an air bearing disposed on the slab, the air bearing positioned under the stage with each protrusion of the pair of protrusions being disposed on opposite sides of the air bearing;
• one or more tracks disposed on the slab, the stage configured to move along the one or more tracks, each of the one or more tracks having a yoke including:
• a lower plate coupled to the slab;
• and
• an upper plate;
• one or more motor coils, each of the motor coils disposed between the lower plate and the upper plate;
• and
• one or more mounts having one or more active compensators of vibrations during operation of the digital lithography system, each of the one or more mounts coupled to a respective motor coil of the one or more motor coils, the stage coupled to each of the one or more mounts, and the one or more active compensators comprise one or more first active compensators configured to compensate vibration in a first direction, one or more second active compensators configured to compensate vibration in a second direction, and one or more third active compensators configured to compensate vibration in a third direction, wherein the first, second, and third directions are perpendicular to one another.

A method of using a digital lithography system, comprising:

• moving a stage along one or more tracks disposed on a slab, the stage coupled to one or more mounts and comprising a pair of protrusions that are disposed adjacent to an air bearing disposed on the slab, the air bearing positioned under the stage with each protrusion of the pair of protrusions being disposed on opposite sides of the air bearing, each mount of the one or more mounts having one or more active compensators, each mount of the one or more mounts coupled to a respective motor coil of one or more motor coils disposed between an upper plate and a lower plate of the one or more tracks, the upper plate and the lower plate having an array of magnets disposed on an inner surface thereof, and the one or more active compensators comprising one or more first active compensators configured to compensate vibration in a first direction, one or more second active compensators configured to compensate vibration in a second direction, and one or more third active compensators configured to compensate vibration in a third direction, wherein the first, second, and third directions are perpendicular to one another;
• measuring vibrations from the motor coils during operation of the digital lithography system with an accelerometer disposed in each active compensator of the one or more active compensators;
• and
• actuating a moving mass disposed in each active compensator of the one or more active compensators in a direction opposite of the vibrations from the motor coils.