Stage device and exposure apparatus
AssigneeNikon Corporation
InventorShiwen Li
Life of this patent
Estimating the term…
Abstract
The shift in the center of gravity of a stage device and the reaction force caused when at least one of a first and second stage devices move, are canceled out by moving a moving member. The shift in the center of gravity of a stage device and the reaction force caused when the stage devices move that cannot be canceled out by moving the moving member, are completely canceled out by moving a base. That is, even if at least one of the first and second stages move, the center of gravity of the stage device does not move, and the reaction force are reliably canceled. Accordingly, by concurrently performing exposure on the two substrates mounted on the first and second stages, the exposure throughput can be improved, and an exposure with a high precision can be performed.
Claims21
A stage device comprising:
- a first and a second stage movably supported on a base;
- a moving member which is movably supported on said base and moves to cancel out a shift in a center of gravity of said stage device when at least one of said first and second stages moves;
- a first driving unit which includes a first mover fixed to said first stage and a first stator fixed to said base, said first driving unit driving said first mover by electromagnetic interaction;
- a second driving unit which includes a second mover fixed to said second stage and a second stator fixed to said base, said second driving unit driving said second mover by electromagnetic interaction;
- and
- a third driving unit which drives said moving member by electromagnetic interaction when at least one of said first and second stages moves.
An exposure apparatus to transfer a predetermined pattern onto a substrate by exposing said substrate with an energy beam, said exposure apparatus comprising:
- a stage device including,
- a first and a second stage movably supported on a base,
- a moving member which is movably supported on said base and moves to cancel out a shift in a center of gravity of said stage device when at least one of said first and second stages moves,
- a first driving unit which includes a first mover fixed to said first stage and a first stator fixed to said base, said first driving unit driving said first mover by electromagnetic interaction,
- a second driving unit which includes a second mover fixed to said second stage and a second stator fixed to said base, said second driving unit driving said second mover by electromagnetic interaction, and
- a third driving unit which drives said moving member by electromagnetic interaction when at least one of said first and second stages moves.
A scanning exposure apparatus comprising:
- a mask stage device which has a fine adjustment stage and a coarse adjustment stage to hold a mask, said stage device moving said mask;
- a substrate stage device which is separated from said coarse adjustment stage and including
- a first substrate stage to hold and move a first substrate, and
- a second substrate stage to hold and move a second substrate;
- a projection optical system which is separated from said coarse adjustment stage and projects a pattern of said mask onto one of said first and second substrate stages;
- a moving member which moves to cancel out a shift in a center of gravity of said substrate stage device when at least one of said first and second substrate stages moves;
- a first driving unit which includes a first mover fixed to said first substrate stage and a first stator, said first driving unit driving said first mover by electromagnetic interaction;
- a second driving unit which includes a second mover fixed to said second substrate stage and a second stator, said second driving unit driving said second mover by electromagnetic interaction;
- and
- a third driving unit which drives said moving member by electromagnetic interaction when at least one of said first and second stages moves.
Dependencies are inferred from the claim text.