A positioning system for positioning an object within an xyz-system of coordinates
AssigneeVdl Enabling Technologies Group B.V.
InventorsJohannes Hubertus Antonius VAN DE RIJDT, Rob Antonius Andries VERKOOIJEN, Johannes Wilhelmus DE KLERK
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Abstract
According to the disclosure, a positioning system for positioning an object within an XYZ-system of coordinates is proposed, with the positioning system comprising a supporting structure, an object table for supporting the object and a positioning module structured for positioning the object table relative to the supporting structure within the XYZ-system of coordinates, wherein the positioning module comprises a frame for supporting the object table and at least three actuator devices, each structured for positioning the frame in the Z-direction of the XYZ-system of coordinates.
Claims11
A positioning system for positioning an object within an XYZ-system of coordinates, the positioning system comprising a supporting structure, an object table for supporting the object and a positioning module structured for positioning the object table relative to the supporting structure within the XYZ-system of coordinates, wherein the positioning module comprises a frame for supporting the object table and at least three actuator devices, each structured for positioning the frame in the Z-direction of the XYZ-system of coordinates.
Dependencies are inferred from the claim text.