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US 12,710,700 B2Granted
Substrate holding apparatus, substrate processing apparatus, separation method, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsYuichiro Morikuni, Shigeo Koya, Kazunori Nakajima, Hikari Watanabe, Daisuke Ogawa
Life of this patent
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Abstract
A substrate holding apparatus includes a holder configured to hold a substrate, and a gas supplier configured to supply a gas between the substrate and the holder, wherein when separating the substrate from the holder holding the substrate, the gas supplier supplies the gas based on information concerning an adhesive force between the substrate and the holder.
Claims16
A substrate holding apparatus comprising:
- a holder configured to hold a substrate by applying a holding force to the substrate;
- a gas supplier configured to supply a gas between the substrate and the holder;
- and
- a controller configured to control the gas supplier,
- wherein an adhesive force between the substrate and the holder decreases over time as the gas is supplied by the gas supplier, the adhesive force being a residual adhesive force remaining after the holder stops application of the holding force holding the substrate, and
- wherein in a case of separating the substrate from the holder, the controller is configured to control a supply amount of the gas to be reduced based on information concerning the residual adhesive force between the substrate and the holder.
3 more elements
A substrate processing apparatus comprising:
- a holder configured to hold a substrate by applying a holding force to the substrate;
- and
- a gas supplier configured to supply a gas between the substrate and the holder;
- and
- a controller configured to control the gas supplier,
- wherein an adhesive force between the substrate and the holder decreases over time as the gas is supplied by the gas supplier, the adhesive force being a residual adhesive force remaining after the holder stops application of the holding force holding the substrate, and
- wherein in a case of separating the substrate from the holder, the controller is configured to control a supply amount of the gas to be reduced based on information concerning the residual adhesive force between the substrate and the holder.
4 more elements
A separation method of separating a substrate from a holder holding the substrate by applying a holding force to the substrate, comprising:
- acquiring information concerning an adhesive force between the substrate and the holder;
- supplying a gas between the substrate and the holder based on the information concerning the adhesive force acquired in the acquiring;
- and
- separating the substrate from the holder after supply of the gas is started in the supplying,
- wherein the adhesive force is a force that decreases over time as the gas is supplied, the adhesive force being a residual adhesive force remaining after the holder stops application of the holding force holding the substrate, and
- wherein in the supplying, a supply amount of the gas is reduced based on information concerning the residual adhesive force.
3 more elements
An article manufacturing method comprising:
- forming a pattern on a substrate held by a holder applying a holding force to the substrate;
- acquiring information concerning an adhesive force between the substrate and the holder;
- supplying, based on the information concerning the adhesive force acquired in the acquiring, a gas between the holder and the substrate with the pattern formed thereon in the forming;
- separating the substrate from the holder after supply of the gas is started in the supplying;
- processing the substrate separated in the separating;
- and
- manufacturing an article using the substrate processed in the processing,
- wherein the adhesive force is a force that decreases over time as the gas is supplied, the adhesive force being a residual adhesive force remaining after the holder stops application of the holding force holding the substrate, and
- wherein in the supplying, a supply amount of the gas is reduced based on information concerning the residual adhesive force.
6 more elements
Dependencies are inferred from the claim text.