Actuator, stage apparatus, lithography apparatus and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorNORIHIRO SAKURAKAWA
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Abstract
An actuator comprising a stator, and a mover configured to move along the stator, wherein the mover includes a housing, a yoke, a magnet adhered to one surface of the yoke via an adhesion layer, and a plurality of fastening members configured to fasten the housing and the yoke, and on an attachment surface of the housing, to which a structure of a driving target of the actuator is attached, the plurality of fastening members are arranged in a non-corner region other than corner regions including corner portions of a sectional region of a cross section of the yoke parallel to the attachment surface.
Claims20
An actuator comprising a stator, and a mover configured to move along the stator, wherein
- the mover comprises:
- a housing;
- a yoke;
- a magnet adhered to one surface of the yoke via an adhesion layer;
- and
- a plurality of fastening members configured to fasten the housing and the yoke, and
- on an attachment surface of the housing, to which a structure of a driving target of the actuator is attached, the plurality of fastening members are arranged in a non-corner region other than corner regions including corner portions of a sectional region of a cross section of the yoke parallel to the attachment surface.
Dependencies are inferred from the claim text.