Magnetically positioned X-Y stage having six degrees of freedom

An overall magnet array defining an X-Y-Z coordinate system with each axis perpendicular to each other axis, each magnet having a particular magnetic field orientation and being substantially the same size and shape as every other magnet, said overall magnet array comprising:

• a first Halbach magnet array, in the form of a first column in an X-Y plane aligned parallel to said Y-axis, said first Halbach magnet array having:
• a first magnet oriented with said magnetic field extending vertically upward therefrom parallel to said Z-axis;
• a second magnet adjacent said first magnet with said magnetic field extending horizontally toward said first magnet parallel to said Y-axis;
• a third magnet adjacent said second magnet with said magnetic field extending vertically downward therefrom parallel to said Z-axis;
• and
• a fourth magnet adjacent said third magnet with said magnetic field extending horizontally away from said third magnet parallel to said Y-axis;
• a second Halbach magnet array, in the form of a second column in the same X-Y plane as said first column, aligned parallel to said Y-axis and spaced apart from said first column a width of a single magnet in the direction of the X-axis, said second Halbach magnet array having:
• a fifth magnet aligned opposite said first magnet in said first column with said magnetic field extending vertically downward therefrom parallel to said Z-axis;
• a sixth magnet adjacent said fifth magnet opposite said second magnet in said first column with said magnetic field extending horizontally away from said fifth magnet parallel to said Y-axis;
• a seventh magnet adjacent said sixth magnet and opposite said third magnet in said first column with said magnetic field extending vertically upward therefrom parallel to said Z-axis;
• and
• an eighth magnet adjacent said seventh magnet and opposite said fourth magnet in said first column with said magnetic field extending horizontally toward from said seventh magnet parallel to said Y-axis;
• a third column of magnets in the same X-Y plane as said first and second columns, aligned parallel to said Y-axis and located between, and adjacent to, each of said first and second columns, said third column of magnets having:
• a ninth magnet between, and adjacent, to both of said first and fifth magnets with said magnetic field extending horizontally toward said first magnet parallel to said X-axis;
• and
• a tenth magnet between, and adjacent to, each of said third and seventh magnets with said magnetic field extending horizontally away from said third magnet parallel to said X-axis;
• and
• a fourth column of magnets in the same X-Y plane as said first, second and third columns, aligned parallel to said Y-axis and located adjacent to said second column on the side of said second column away from said first column, said fourth column of magnets having:
• an eleventh magnet adjacent to said fifth magnet with said magnetic field extending horizontally away from said fifth magnet parallel to said X-axis;
• and
• a twelfth magnet adjacent to said seventh magnet with said magnetic field extending horizontally toward said seventh magnet parallel to said X-axis;
• wherein each of said magnets has a upper and a lower lateral extent in reference to said Y-axis with the upper and lower lateral extent of each magnet in said second column being aligned with the upper and lower lateral extent of the magnet in said first column that the magnet in said second column is opposite, and the upper and lower lateral extent of said ninth, tenth, eleventh and twelfth magnets in said third and fourth columns, respectively, being aligned with the upper and lower lateral extent of each magnet in said first or second column that said magnet is said to be adjacent.

An apparatus for magnetically positioning a movable X-Y stage with respect to X and Y horizontal axes and a Z vertical axis that comprises:

• a first commutated coil of wire that lies substantially in a first horizontal X-Y plane and is angularly offset in said first horizontal X-Y plane by minus a first oblique angle with respect to said Y axis;
• a second commutated coil of wire that lies substantially in a second horizontal X-Y plane substantially in vertical alignment with said first horizontal X-Y plane and angularly offset in said second horizontal X-Y plane by plus a second oblique angle with respect to said X axis;
• a first set of a plurality of flat stationary electromagnetic coils of wire that lie substantially in said first horizontal X-Y plane mid-way between the windings of said first commutated coil of wire and are angularly offset in said first horizontal X-Y plane by minus said first oblique angle with respect to said Y axis;
• a second set of a plurality of flat stationary electromagnetic coils of wire that lie substantially in said second horizontal X-Y plane mid-way between the windings of said second commutated coil of wire and are angularly offset in said second horizontal X-Y plane by minus said second oblique angle with respect to said X axis;
• a two dimensional array of Halbach magnet arrays attached to said movable X-Y stage, wherein said array substantially lies in a third horizontal X-Y plane, is oriented substantially parallel to the same one of said X and Y horizontal axes with respect to which said first and second oblique angles are measured, and is simultaneously situated in a cooperative relationship with both of said first and second commutated coils of wire, and said first and second set of electromagnetic coils of wire;
• and
• means for levitating said two dimensional array of Halbach magnet arrays in said third X-Y plane;
• wherein tangential forces are applied to said X-Y stage to produce a variation of the theta/yaw of said X-Y stage by said first and second commutated coils of wire, vertical forces are applied to said X-Y stage to produce a variation of the roll of said X-Y stage about the Y axis by said first set of electromagnetic coils of wire, and vertical forces are applied to said X-Y stage to produce a variation of the pitch of said X-Y stage about the X axis by said second set of electromagnetic coils of wire wherein said forces may be selectively generated in accordance with the phase and magnitude of current energizing a wire of some of each of said coils of wire.