Screw transmission drive, and reticle stage and measuring device for semiconductor lithography applications

Abstract

The invention relates to a screw transmission drive, in particular for the reticle stage of a device for lithography applications, comprising a leadscrew, which has a power transmission thread and a leadscrew nut which interacts with the power transmission thread, and a controllable drive for rotating the leadscrew, wherein the leadscrew nut is connected to a leadscrew flange for connection to a component to be moved relative to the drive; the leadscrew flange has two connection elements for connecting, respectively, to the leadscrew nut and to the component to be moved, the connection elements being connected by six elastically deformable struts of identical length which are fixedly clamped at both ends; the clamping points of the struts at the connection elements are distributed, in two parallel connection planes, in pairs at regular intervals over respective connection circles such that each pair of mutually adjacent struts includes an angle; the ratio of the radii of the two connection circles is 0.5, and the connection circles are coaxially located on a common longitudinal axis. The invention also relates to a reticle stage and to a device having a reticle stage, the reticle stage having a screw transmission drive according to the invention.

Dependencies are inferred from the claim text.