Internally-cooled actuator coil
AssigneeASML Netherlands B.V.
InventorJoost VERSTEIJLEN
Life of this patent
Estimating the term…
Abstract
A coil to be fluid-cooled for use in electromagnetic actuators of lithography apparatuses, the coil formed of a plurality of electrically-insulated flat wire coil conductors and configured to conduct an electric current to generate an electromagnetic field during use, and at least one cooling fluid channel in heat-conducting contact with the coil, for guiding a flow of cooling fluid to withdraw heat from the coil, the cooling fluid channel being provided across the coil, crossing through multiple of the coil conductors.
Claims16
1-15. (canceled)
A coil to be fluid-cooled for use in electromagnetic actuators of lithography apparatuses, the coil being formed of a plurality of electrically-insulated flat wire coil conductors extending in a coil plane and configured to conduct an electric current to generate an electromagnetic field during use, the coil comprising:
- at least one cooling fluid channel in heat-conducting contact with the coil configured to guide a flow of cooling fluid to withdraw heat from the coil,
- wherein the cooling fluid channel is provided across the coil crossing through substantially all the coil conductors.
A method of manufacturing comprising:
- forming a coil from a plurality of flat wire coil conductors, the coil being fluid-cooled for use in electromagnetic actuators of lithography apparatuses, the coil being formed of a plurality of electrically-insulated flat wire coil conductors extending in a coil plane and configured to conduct an electric current to generate an electromagnetic field during use, the coil comprising at least one cooling fluid channel in heat-conducting contact with the coil configured to guide a flow of cooling fluid to withdraw heat from the coil, the cooling fluid channel being provided across the coil crossing through substantially all the coil conductors;
- and
- forming the cooling fluid channel across the coil.
Dependencies are inferred from the claim text.