G03F 7/70658
Electrical testing
Official title: {Electrical testing}
G03F7/70658 (Electrical testing) appears on 149 US grants and 94 published applications in this corpus.
Search patents in G03F- Granted patents
- 149
- Published applications
- 94
- Assignees
- 48
- Inventors
- 195
- Latest grant
- 7 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 1 | 0 |
| 1991 | 3 | 0 |
| 1992 | 1 | 0 |
| 1993 | 1 | 0 |
| 1994 | 4 | 0 |
| 1995 | 5 | 0 |
| 1996 | 3 | 0 |
| 1997 | 11 | 0 |
| 1998 | 10 | 0 |
| 1999 | 9 | 0 |
| 2000 | 2 | 0 |
| 2001 | 5 | 0 |
| 2002 | 4 | 19 |
| 2003 | 4 | 8 |
| 2004 | 13 | 11 |
| 2005 | 9 | 7 |
| 2006 | 5 | 3 |
| 2007 | 6 | 5 |
| 2008 | 6 | 5 |
| 2009 | 6 | 2 |
| 2010 | 9 | 7 |
| 2011 | 7 | 2 |
| 2012 | 1 | 3 |
| 2013 | 4 | 2 |
| 2014 | 3 | 0 |
| 2015 | 0 | 1 |
| 2016 | 1 | 0 |
| 2017 | 0 | 1 |
| 2018 | 0 | 0 |
| 2019 | 1 | 1 |
| 2020 | 1 | 2 |
| 2021 | 2 | 2 |
| 2022 | 1 | 3 |
| 2023 | 1 | 5 |
| 2024 | 2 | 4 |
| 2025 | 4 | 1 |
| 2026 | 2 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Method for characterizing a manufacturing process of semiconductor devices7 Jul 2026US 12,675,051 B2ASML Netherlands B. V.
- Semiconductor structure and method for forming the same21 Apr 2026US 12,607,941 B2Winbond Electronics Corp.
- Mark to be projected on an object during a lithographic process and method for designing a mark23 Sep 2025US 12,422,757 B2ASML Netherlands B. V.
- Information processing apparatus, information processing method, article manufacturing system, and article manufacturing method15 Jul 2025US 12,362,209 B2Canon Kabushiki Kaisha
- System for automatic diagnostics and monitoring of semiconductor defect die screening performance through overlay of defect and electrical test data17 Jun 2025US 12,332,182 B2KLA Corporation
- Method for manufacturing silicon balance springs4 Dec 2025US 2025/0370350 A1Sercalo Microtechnology Limited
- Overlay measurement using balanced capacity targets26 Dec 2024US 2024/0427253 A1ASML Netherlands B. V.
- System and method for inspection by failure mechanism classification and identification in a charged particle system26 Sep 2024US 2024/0319123 A1ASML Netherlands B. V.
- A method for characterizing a manufacturing process of semiconductor devices4 Apr 2024US 2024/0111218 A1ASML Netherlands B. V.
- Method to predict metrology offset of a semiconductor manufacturing process21 Mar 2024US 2024/0094640 A1ASML Netherlands B. V.
Most cited
By later US patents
- Membrane dielectric isolation IC fabrication334US 6,008,126 AElm Technology Corporation · 1999
- Making and testing an integrated circuit using high density probe points307US 5,103,557 A1992
- Lithography device for semiconductor circuit pattern generator287US 7,242,012 B2Elm Technology Corporation · 2007
- Method of making a flexible tester surface for testing integrated circuits253US 5,020,219 A1991
- Methods and systems for determining a critical dimension and a thin film characteristic of a specimen248US 6,633,831 B2KLA-Tencor Technologies Corporation · 2003