System for automatic diagnostics and monitoring of semiconductor defect die screening performance through overlay of defect and electrical test data

A screening system comprising:

• a controller communicatively coupled to one or more sample analysis tools, wherein the one or more sample analysis tools comprise at least one inline characterization tool and at least one electrical test tool, the controller including one or more processors configured to execute program instructions causing the one or more processors to:
• identify, with a defect classifier of the at least one inline characterization tool, defect results for a population of dies based on inline characterization tool data received from the at least one inline characterization tool of the one or more sample analysis tools;
• identify electrical test results for the population of dies based on electrical test data received from the at least one electrical test tool of the one or more sample analysis tools;
• generate one or more correlation metrics based on the identified defect results and the identified electrical test results, wherein the one or more correlation metrics comprise a classifier confidence metric of the defect classifier;
• and
• determine at least one diagnosis of the screening system based on the one or more correlation metrics, the at least one diagnosis corresponding to a performance of the screening system.