Information processing apparatus, information processing method, article manufacturing system, and article manufacturing method

An information processing method performed by a processor executing a program stored by a memory comprising:

• acquiring information including a processing result of processing a substrate by a substrate processing apparatus configured to perform substrate processing at a first timing, event information on an event having occurred in the substrate processing apparatus at a second timing after the first timing, and a processing result of processing the substrate by the substrate processing apparatus at a third timing after the second timing;
• selecting the event having occurred in the substrate processing apparatus;
• and
• performing control so that a display device displays a chronological graph of a processing result including the processing result at the first timing and the processing result at the third timing based on the acquired information,
• wherein information indicating the second timing of the occurrence of the selected event relating to the substrate processing apparatus is displayed on the chronological graph, and
• wherein the event information includes at least one of information on resetting to initialize each unit of the substrate processing apparatus, information on a command given by a user to cause the substrate processing apparatus to perform a predetermined operation, information on replacement of a reticle on which a circuit pattern to be transferred to the substrate is drawn, and information on maintenance of the substrate processing apparatus.

A non-transitory computer-readable storage medium storing a program for causing a computer to execute an information processing method performed by a processor executing a program stored by a memory comprising:

• acquiring information including a processing result of processing a substrate by a substrate processing apparatus configured to perform substrate processing at a first timing, event information on an event having occurred in the substrate processing apparatus at a second timing after the first timing, and a processing result of processing the substrate by the substrate processing apparatus at a third timing after the second timing;
• selecting the event having occurred in the substrate processing apparatus;
• and
• performing control so that a display device displays a chronological graph of a processing result including the processing result at the first timing and the processing result at the third timing based on the acquired information,
• wherein information indicating the second timing of the occurrence of the selected event relating to the substrate processing apparatus is displayed on the chronological graph, and
• wherein the event information includes at least one of information on resetting to initialize each unit of the substrate processing apparatus, information on a command given by a user to cause the substrate processing apparatus to perform a predetermined operation, information on replacement of a reticle on which a circuit pattern to be transferred to the substrate is drawn, and information on maintenance of the substrate processing apparatus.

An article manufacturing system comprising:

• a pattern forming apparatus configured to form a pattern on a substrate;
• and
• an information processing apparatus configured to manage a plurality of apparatuses including the pattern forming apparatus,
• the information processing apparatus including:
• a processor;
• a memory storing a program that, when executed by the processor, cause the processor to function as:
• an acquisition unit configured to acquire information including a processing result of processing a substrate by a substrate processing apparatus configured to perform substrate processing at a first timing, event information on an event having occurred in the substrate processing apparatus at a second timing after the first timing, and a processing result of processing the substrate by the substrate processing apparatus at a third timing after the second timing;
• a selection unit configured to select the event having occurred in the substrate processing apparatus;
• and
• a display control unit configured to perform control so that a display device displays a chronological graph of a processing result including the processing result at the first timing and the processing result at the third timing based on the information acquired by the acquisition unit,
• wherein the display control unit performs control to display information indicating the second timing of the occurrence of the event selected by the selection unit on the chronological graph, and
• wherein the event information includes at least one of information on resetting to initialize each unit of the substrate processing apparatus, information on a command given by a user to cause the substrate processing apparatus to perform a predetermined operation, information on replacement of a reticle on which a circuit pattern to be transferred to the substrate is drawn, and information on maintenance of the substrate processing apparatus.

An article manufacturing method comprising:

• forming a pattern on a substrate using an article manufacturing system including a pattern forming apparatus configured to form a pattern on a substrate and an information processing apparatus configured to manage a plurality of apparatuses including the pattern forming apparatus;
• and
• performing at least one of oxidation, film formation, deposition, doping, planarization, etching, resist removing, dicing, bonding, and packaging processing on the substrate having the pattern formed thereon,
• wherein an article is manufactured from the processed substrate,
• the information processing apparatus including:
• a processor;
• a memory storing a program that, when executed by the processor, cause the processor to function as:
• an acquisition unit configured to acquire information including a processing result of processing a substrate by a substrate processing apparatus configured to perform substrate processing at a first timing, event information on an event having occurred in the substrate processing apparatus at a second timing after the first timing, and a processing result of processing the substrate by the substrate processing apparatus at a third timing after the second timing;
• a selection unit configured to select the event having occurred in the substrate processing apparatus;
• and
• a display control unit configured to perform control so that a display device displays a chronological graph of a processing result including the processing result at the first timing and the processing result at the third timing based on the information acquired by the acquisition unit,
• wherein the display control unit performs control to display information indicating the second timing of the occurrence of the event selected by the selection unit on the chronological graph, and
• wherein the event information includes at least one of information on resetting to initialize each unit of the substrate processing apparatus, information on a command given by a user to cause the substrate processing apparatus to perform a predetermined operation, information on replacement of a reticle on which a circuit pattern to be transferred to the substrate is drawn, and information on maintenance of the substrate processing apparatus.