Methods and systems for determining a critical dimension and a thin film characteristic of a specimen

A method for determining at least two properties of a specimen, comprising:

• disposing the specimen upon a stage, wherein the stage is coupled to a measurement device, and wherein the measurement device comprises an illumination system and a detection system;
• directing energy toward a surface of the specimen using the illumination system;
• detecting energy propagating from the surface of the specimen using the detection system;
• generating one or more output signals in response to the detected energy;
• and
• processing the one or more output signals to determine a first property and a second property of the specimen, wherein the first property comprises a critical dimension of the specimen, and wherein the second property comprises a thin film characteristic of the specimen.

A computer-implemented method for controlling a system configured to determine at least two properties of a specimen during use, wherein the system comprises a measurement device, comprising:

• controlling the measurement device, wherein the measurement device comprises an illumination system and a detection system, and wherein the measurement device is coupled to a stage, comprising:
• controlling the illumination system to direct energy toward a surface of the specimen;
• controlling the detection system to detect energy propagating from the surface of the specimen;
• and
• generating one or more output signals responsive to the detected energy;
• and
• processing the one or more output signals to determine a first property and a second property of the specimen, wherein the first property comprises a critical dimension of the specimen, and wherein the second property comprises a thin film characteristic of the specimen.

A method for fabricating a semiconductor device, comprising:

• forming a portion of the semiconductor device upon a specimen;
• disposing the specimen upon a stage, wherein the stage is coupled to a measurement device, and wherein the measurement device comprises an illumination system and a detection system;
• directing energy toward a surface of the specimen using the illumination system;
• detecting energy propagating from the surface of the specimen using the detection system;
• generating one or more output signals in response to the detected energy;
• and
• processing the one or more output signals to determine a first property and a second property of the specimen, wherein the first property comprises a critical dimension of the specimen, and wherein the second property comprises a thin film characteristic of the specimen.

A system configured to determine at least two properties of a specimen during use, comprising:

• a stage configured to support the specimen during use;
• a measurement device coupled to the stage, comprising:
• an illumination system configured to direct energy toward a surface of the specimen during use;
• and
• a detection system coupled to the illumination system and configured to detect energy propagating from the surface of the specimen during use, wherein the measurement device is configured to generate one or more output signals responsive to the detected energy;
• a local processor coupled to the measurement device and configured to at least partially process the one or more output signals during use;
• and
• a remote controller computer coupled to the local processor, wherein the remote controller computer is configured to receive the at least partially processed one or more output signals and to determine a first property and a second property of the specimen from the at least partially processed one or more output signals during use, wherein the first property comprises a critical dimension of the specimen, and wherein the second property comprises a thin film characteristic of the specimen.

A method for determining at least two properties of a specimen, comprising:

• disposing the specimen upon a stage, wherein the stage is coupled to a measurement device, and wherein the measurement device comprises an illumination system and a detection system;
• directing energy toward a surface of the specimen using the illumination system;
• detecting energy propagating from the surface of the specimen using the detection system:
• generating one or more output signals responsive to the detected energy;
• and
• processing the one or more output signals to determine a first property and a second property of the specimen, wherein the first property comprises a critical dimension of the specimen, and wherein the second property comprises a thin film characteristic of the specimen, comprising:
• at least partially processing the one or more output signals using a local processor, wherein the local processor is coupled to the measurement device;
• sending the partially processed one or more output signals from the local processor to a remote controller computer;
• and
• further processing the partially processed one or more output signals using the remote controller computer.