G03F 7/168
Finishing the coated layer
Official title: {Finishing the coated layer, e.g. drying, baking, soaking}
G03F7/168 (Finishing the coated layer) appears on 1,354 US grants and 1,880 published applications in this corpus.
Search patents in G03F- Granted patents
- 1,354
- Published applications
- 1,880
- Assignees
- 396
- Inventors
- 3,229
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 3 | 0 |
| 1982 | 2 | 0 |
| 1983 | 1 | 0 |
| 1984 | 2 | 0 |
| 1985 | 3 | 0 |
| 1986 | 4 | 0 |
| 1987 | 5 | 0 |
| 1988 | 2 | 0 |
| 1989 | 7 | 0 |
| 1990 | 3 | 0 |
| 1991 | 2 | 0 |
| 1992 | 5 | 0 |
| 1993 | 2 | 0 |
| 1994 | 3 | 0 |
| 1995 | 6 | 0 |
| 1996 | 6 | 0 |
| 1997 | 15 | 0 |
| 1998 | 21 | 0 |
| 1999 | 12 | 0 |
| 2000 | 10 | 0 |
| 2001 | 18 | 9 |
| 2002 | 20 | 17 |
| 2003 | 14 | 25 |
| 2004 | 18 | 33 |
| 2005 | 14 | 33 |
| 2006 | 19 | 31 |
| 2007 | 14 | 35 |
| 2008 | 14 | 31 |
| 2009 | 18 | 11 |
| 2010 | 22 | 15 |
| 2011 | 17 | 18 |
| 2012 | 16 | 18 |
| 2013 | 14 | 14 |
| 2014 | 20 | 35 |
| 2015 | 25 | 41 |
| 2016 | 39 | 81 |
| 2017 | 71 | 212 |
| 2018 | 95 | 153 |
| 2019 | 126 | 174 |
| 2020 | 116 | 170 |
| 2021 | 109 | 97 |
| 2022 | 115 | 93 |
| 2023 | 92 | 113 |
| 2024 | 81 | 135 |
| 2025 | 81 | 160 |
| 2026 | 51 | 126 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
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Most cited
By later US patents
- Substrate processing system, coating/developing apparatus, and substrate processing apparatus485US 7,379,785 B2Tokyo Electron Limited · 2008
- Photo resist baking in lithography process177US 9,223,220 B2Taiwan Semiconductor Manufacturing Company.Ltd · 2015
- Method for etching damaged zones on an edge of a semiconductor substrate, and etching system112US 5,945,351 ASiemens Aktiengesellschaft · 1999
- Process for preparing a patterned continuous polymeric brush on a substrate surface102US 6,423,465 B1International Business Machines Corporation · 2002
- Surface switchable photoresist93US 8,715,919 B2Taiwan Semiconductor Manufacturing Company.Ltd · 2014