Negative resist composition and method for producing resist pattern
AssigneeSumitomo Chemical Company, Limited
InventorsSuguru TANIGUCHI, Masako SUGIHARA
Life of this patent
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Abstract
A negative resist composition capable of forming a resist pattern having a favorable shape is provided. In addition, a method for producing a resist pattern using the negative resist composition is provided. A negative resist composition includes: a resin (A1) including a structural unit represented by a formula (a2-1) and a structural unit represented by a formula (a2-4); an acid generator (B); a crosslinking agent (E); and an aromatic compound (I) having a molecular weight of 2,000 or less and having three or more phenolic hydroxyl groups, and a method for producing a resist pattern using the composition.
Claims5
A negative resist composition comprising:
- a resin (A1) including a structural unit represented by a formula (a2-1) and a structural unit represented by a formula (a2-4);
- an acid generator (B);
- a crosslinking agent (E);
- and
- an aromatic compound (I) having a molecular weight of 2,000 or less and having three or more phenolic hydroxyl groups, wherein
- in the formula (a2-1) and the formula (a2-4),
- Ra7 and Ra13 each independently represent a hydrogen atom or a methyl group,
- Ra10 and Ra14 each independently represent an alkyl group having 1 to 6 carbon atoms,
- Ra15 represents a hydrocarbon group having 1 to 12 carbon atoms,
- m1 represents an integer of 0 to 4, when m1 is 2 or more, a plurality of Ra10 may be same or different from each other,
- m2 represents an integer of 1 to 4,
- provided that a sum of m1 and m2 is 5 or less,
- m3 represents an integer of 0 to 4, when m3 is 2 or more, a plurality of Ra14 may be same or different from each other,
- m4 represents an integer of 1 to 4, when m4 is 2 or more, a plurality of Ra15 may be same or different from each other, and
- provided that a sum of m3 and m4 is 5 or less.
Dependencies are inferred from the claim text.