C23C 16/481
By radiant heating of the substrate
Official title: {by radiant heating of the substrate}
C23C16/481 (By radiant heating of the substrate) appears on 454 US grants and 397 published applications in this corpus.
Search patents in C23C- Granted patents
- 454
- Published applications
- 397
- Assignees
- 192
- Inventors
- 1,056
- Latest grant
- 14 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1978 | 2 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 1 | 0 |
| 1983 | 2 | 0 |
| 1984 | 2 | 0 |
| 1985 | 10 | 0 |
| 1986 | 4 | 0 |
| 1987 | 5 | 0 |
| 1988 | 3 | 0 |
| 1989 | 6 | 0 |
| 1990 | 6 | 0 |
| 1991 | 5 | 0 |
| 1992 | 8 | 0 |
| 1993 | 11 | 0 |
| 1994 | 7 | 0 |
| 1995 | 10 | 0 |
| 1996 | 15 | 0 |
| 1997 | 8 | 0 |
| 1998 | 17 | 0 |
| 1999 | 13 | 0 |
| 2000 | 32 | 0 |
| 2001 | 28 | 9 |
| 2002 | 30 | 32 |
| 2003 | 16 | 13 |
| 2004 | 12 | 16 |
| 2005 | 12 | 22 |
| 2006 | 11 | 16 |
| 2007 | 4 | 14 |
| 2008 | 6 | 9 |
| 2009 | 7 | 9 |
| 2010 | 4 | 23 |
| 2011 | 6 | 15 |
| 2012 | 10 | 21 |
| 2013 | 9 | 18 |
| 2014 | 15 | 13 |
| 2015 | 8 | 18 |
| 2016 | 5 | 24 |
| 2017 | 16 | 15 |
| 2018 | 15 | 7 |
| 2019 | 8 | 13 |
| 2020 | 12 | 12 |
| 2021 | 12 | 10 |
| 2022 | 12 | 15 |
| 2023 | 8 | 10 |
| 2024 | 7 | 16 |
| 2025 | 7 | 18 |
| 2026 | 7 | 9 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
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Most cited
By later US patents
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- Substrate platform for a semiconductor substrate during rapid high temperature processing and method of supporting a substrate678US 6,090,212 AMicro C Technologies, Inc. · 2000
- Rapid thermal processing apparatus for processing semiconductor wafers624US 5,444,217 AMoore Epitaxial, Inc. · 1995
- Process chamber with inner support569US 6,093,252 AASM America, Inc. · 2000