B81C 2201/0187
Controlled formation of micro- or nanostructures using a template positioned on a
Official title: Controlled formation of micro- or nanostructures using a template positioned on a substrate
B81C2201/0187 (Controlled formation of micro- or nanostructures using a template positioned on a) appears on 25 US grants and 29 published applications in this corpus.
Search patents in B81C- Granted patents
- 25
- Published applications
- 29
- Assignees
- 28
- Inventors
- 90
- Latest grant
- 18 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2000 | 1 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 1 |
| 2005 | 1 | 0 |
| 2006 | 0 | 0 |
| 2007 | 0 | 0 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 0 | 2 |
| 2012 | 0 | 3 |
| 2013 | 0 | 0 |
| 2014 | 0 | 1 |
| 2015 | 3 | 2 |
| 2016 | 3 | 2 |
| 2017 | 1 | 4 |
| 2018 | 2 | 2 |
| 2019 | 3 | 3 |
| 2020 | 2 | 0 |
| 2021 | 2 | 4 |
| 2022 | 4 | 2 |
| 2023 | 0 | 0 |
| 2024 | 1 | 1 |
| 2025 | 0 | 1 |
| 2026 | 2 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Multi-level mems process18 Aug 2026US 12,709,540 B2InvenSense, Inc.
- Process for manufacturing a microelectromechanical mirror device and microelectromechanical mirror device5 May 2026US 12,619,065 B2STMicroelectronics S,r.l.
- Flexible electrode and preparation method thereof30 Apr 2024US 11,970,391 B2Shenzhen Institutes of Advanced Technology
- Method for producing a micromechanical device having a damper structure22 Nov 2022US 11,505,455 B2Robert Bosch GmbH
- System and methods for microfabrication19 Apr 2022US 11,305,987 B2Beijing Voyager Technology Co., Ltd.
- Methods for fabrication of mems devices17 Sep 2026US 2026/0274654 A1Omnitron Sensors Inc.
- Mems micromirror for alleviating optical path blockage, and preparation method therefor5 Jun 2025US 2025/0180889 A1Xi An Zhisensor Technologies Co., Ltd.
- Multi-level mems process24 Oct 2024US 2024/0351864 A1InvenSense, Inc.
- Process for manufacturing a microelectromechanical mirror device and microelectromechanical mirror device3 Nov 2022US 2022/0350134 A1STMicroelectronics S,r.l.
- Flexible electrode and preparation method thereof28 Jul 2022US 2022/0234885 A1Shenzhen Institutes of Advanced Technology
Most cited
By later US patents
- Multiple patterned structures on a single substrate fabricated by elastomeric micro-molding techniques161US 6,039,897 AUniversity of Washington · 2000
- Nanoshape patterning techniques that allow high-speed and low-cost fabrication of nanoshape structures46US 10,026,609 B2Board of Regents, The University of Texas System · 2018
- Three-dimensional copper nanostructure and fabrication method thereof5US 9,139,914 B2Ajou University Industry-Academic Cooperation Foundation · 2015
- Method for the production of three-dimensional microstructures3US 8,986,563 B2Nanoscribe GmbH · 2015
- Physical quantity sensor manufacturing method, physical quantity sensor, electronic device, and vehicle2US 10,850,975 B2Seiko Epson Corporation · 2020