Multi-level mems process

A method for sensing acceleration with a multi-level microelectromechanical system (MEMS) sensor, comprising:

• receiving a first sense signal representative of a first capacitance between a first planar surface of an actuator layer and a sense electrode of a substrate layer that faces the first planar surface;
• receiving a second sense signal representative of a second capacitance between a second planar surface of the actuator layer and a multi-level feature that faces the second planar surface, wherein the second parallel surface is parallel to the first planar surface on an opposite side of the actuator layer, and wherein the multi-level feature extends from the actuator layer, and
• determining, by processing circuitry, the acceleration based on the first sense signal and the second sense signal.