Physical quantity sensor manufacturing method, physical quantity sensor, electronic device, and vehicle

A physical quantity sensor manufacturing method comprising:

• forming a first fixed electrode and a second fixed electrode on a substrate, and forming a dummy electrode so as to be adjacent to the first fixed electrode;
• and
• forming a movable body which overlaps with the first fixed electrode and the second fixed electrode in plan view, is at the same potential as the dummy electrode, and displaces in a direction intersecting with a main surface of the substrate according to a physical quantity, and
• wherein the electrode forming includes
• forming a first mask layer on the substrate;
• forming a first electrode material layer, by forming a first conductive layer on the substrate and on the first mask layer, and removing the first mask layer;
• forming a second conductive layer on the substrate and on the first electrode material layer;
• forming a second mask layer, by forming a mask material layer on the second conductive layer and removing a part of a section of the mask material layer not overlapping the first electrode material layer in plan view;
• and
• forming a second electrode material layer by etching the second conductive layer by using the second mask layer as a mask so that the second conductive layer is provided on the first electrode material layer and on the substrate.