B81C 2201/0152
Step and flash imprinting, uv imprinting
Official title: Step and Flash imprinting, UV imprinting
B81C2201/0152 (Step and flash imprinting, uv imprinting) appears on 8 US grants and 13 published applications in this corpus.
Search patents in B81C- Granted patents
- 8
- Published applications
- 13
- Assignees
- 14
- Inventors
- 50
- Latest grant
- 22 Nov 2022
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2002 | 1 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 2 |
| 2005 | 0 | 3 |
| 2006 | 1 | 1 |
| 2007 | 1 | 1 |
| 2008 | 0 | 0 |
| 2009 | 0 | 1 |
| 2010 | 1 | 0 |
| 2011 | 0 | 1 |
| 2012 | 0 | 0 |
| 2013 | 0 | 2 |
| 2014 | 0 | 0 |
| 2015 | 1 | 0 |
| 2016 | 2 | 0 |
| 2017 | 0 | 1 |
| 2018 | 0 | 0 |
| 2019 | 0 | 0 |
| 2020 | 0 | 0 |
| 2021 | 0 | 1 |
| 2022 | 1 | 0 |
By publication year.
Recent patents
- Method for producing a micromechanical device having a damper structure22 Nov 2022US 11,505,455 B2Robert Bosch GmbH
- Processes for rapid microfabrication using thermoplastics and devices thereof20 Dec 2016US 9,522,820 B2The Regents of the University of California
- Process for making a patterned metal oxide structure7 Jun 2016US 9,362,126 B2Agency for Science, Technology and Research
- Method of manufacturing stamp for plasmonic nanolithography apparatus and plasmonic nanolithography apparatus12 May 2015US 9,028,639 B2Korea Institute of Machinery & Materials
- Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same6 Apr 2010US 7,690,912 B2Canon Kabushiki Kaisha
- Method for producing a micromechanical device having a damper structure17 Jun 2021US 2021/0179422 A1Robert Bosch GmbH
- Processes for rapid microfabrication using thermoplastics and devices thereof25 May 2017US 2017/0144152 A1The Regents of the University of California
- Method of manufacturing stamp for plasmonic nanolithography apparatus and plasmonic nanolithography apparatus26 Dec 2013US 2013/0340929 A1Korea Institute of Machinery & Materials
- Process for making a patterned metal oxide structure28 Mar 2013US 2013/0078796 A1Agency for Science, Technology and Research
- Processes for rapid microfabrication using thermoplastics and devices thereof26 May 2011US 2011/0122406 A1The Regents of the University of California
Most cited
By later US patents
- Multilayer resist structure, and method of manufacturing three-dimensional microstructure with use thereof11US 6,455,227 B1Sony Corporation · 2002
- Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same3US 7,690,912 B2Canon Kabushiki Kaisha · 2010
- Processes for rapid microfabrication using thermoplastics and devices thereof2US 9,522,820 B2The Regents of the University of California · 2016
- Method for manufacturing MEMS structures1US 7,176,047 B2Taiwan Semiconductor Manufacturing Company.Ltd · 2007
- Process for making a patterned metal oxide structure1US 9,362,126 B2Agency for Science, Technology and Research · 2016