B81C 1/00492
Processes for surface micromachining not provided for in groups b81c1/0046 - b81c1/00484
Official title: {Processes for surface micromachining not provided for in groups B81C1/0046 - B81C1/00484}
B81C1/00492 (Processes for surface micromachining not provided for in groups b81c1/0046 - b81c1/00484) appears on 55 US grants and 80 published applications in this corpus.
Search patents in B81C- Granted patents
- 55
- Published applications
- 80
- Assignees
- 56
- Inventors
- 207
- Latest grant
- 5 May 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1999 | 1 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 1 |
| 2002 | 0 | 1 |
| 2003 | 2 | 0 |
| 2004 | 1 | 8 |
| 2005 | 3 | 12 |
| 2006 | 1 | 6 |
| 2007 | 8 | 3 |
| 2008 | 3 | 3 |
| 2009 | 4 | 3 |
| 2010 | 1 | 2 |
| 2011 | 1 | 3 |
| 2012 | 0 | 3 |
| 2013 | 2 | 2 |
| 2014 | 3 | 4 |
| 2015 | 3 | 7 |
| 2016 | 3 | 6 |
| 2017 | 2 | 0 |
| 2018 | 3 | 0 |
| 2019 | 1 | 1 |
| 2020 | 4 | 4 |
| 2021 | 2 | 3 |
| 2022 | 4 | 3 |
| 2023 | 1 | 2 |
| 2024 | 0 | 2 |
| 2025 | 1 | 0 |
| 2026 | 1 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Process for manufacturing a microelectromechanical mirror device and microelectromechanical mirror device5 May 2026US 12,619,065 B2STMicroelectronics S,r.l.
- Cross-scale structure feature surface machining method based on multi-component collaborative vibration15 Jul 2025US 12,360,508 B2Harbin Institute of Technology
- Surface micromachined structures1 Aug 2023US 11,713,243 B2Texas Instruments Incorporated
- Atomic-scale e-beam sculptor6 Dec 2022US 11,518,674 B2UT-Battelle, LLC
- Surface micromachined structures6 Sep 2022US 11,434,130 B2Texas Instruments Incorporated
- Method for producing microelectromechanical structures15 Jan 2026US 2026/0015225 A1
- Active matrix programmable mirror31 Oct 2024US 2024/0359974 A1Obsidian Sensors, Inc.
- Semiconductor package with floating metal portion and method for manufacturing17 Oct 2024US 2024/0343553 A1Infineon Technologies AG
- Production of structured surfaces9 Nov 2023US 2023/0356452 A1Forschungszentrum Juelich GmbH
- Cross-scale structure feature surface machining method based on multi-component collaborative vibration10 Aug 2023US 2023/0251619 A1Harbin Institute of Technology, Shenzhen
Most cited
By later US patents
- Method for integration of microelectronic components with microfluidic devices61US 7,087,444 B2Palo Alto Research Center Incorporated · 2006
- Ultraviolet method of embedding structures in photocerams33US 6,932,933 B2The Aerospace Corporation · 2005
- Method and apparatus for maintaining parallelism of layers and/or achieving desired thicknesses of layers during the electrochemical fabrication of structures23US 7,271,888 B2Microfabrica Inc. · 2007
- Methods for electrochemically fabricating structures using adhered masks, incorporating dielectric sheets, and/or seed layers that are partially removed via planarization22US 7,501,328 B2Microfabrica Inc. · 2009
- Multi-cell masks and methods and apparatus for using such masks to form three-dimensional structures19US 7,229,544 B2University of Southern California · 2007