Ultraviolet method of embedding structures in photocerams
AssigneeThe Aerospace Corporation
InventorsHenry Helvajian, Peter D. Fuqua, William W. Hansen
Life of this patent
Estimating the term…
Loading patent…
AssigneeThe Aerospace Corporation
InventorsHenry Helvajian, Peter D. Fuqua, William W. Hansen
Estimating the term…
A laser direct write method creates true three dimensional structures within photocerams using an focused pulsed ultraviolet laser with a wavelength in a weakly absorbing region of the photoceram material. A critical dose of focused laser UV light selectively exposes embedded volumes of the material for subsequent selective etching. The photoceram material exposure is nonlinear with the laser fluence and the critical dose depends on the square of the per shot fluence and the number of pulses. The laser light is focused to a focal depth for selective volumetric exposure of the material within a focal volume within the remaining collateral volumes that is critically dosed for selecting etching and batch fabrication of highly defined embedded structures.
A method of vacating a portion of a photoceram, the method comprising,
A method of forming a three dimensional embedded structure in a photoceram, the method comprising,
A method of forming a three dimensional embedded structure in a photoceram, the method comprising,
Dependencies are inferred from the claim text.