Atomic-scale e-beam sculptor
AssigneeUT-Battelle, LLC
InventorsSergei V. Kalinin, Stephen Jesse, Albina Y. Borisevich, Ondrej E. Dyck, Bobby G. Sumpter, Raymond R. Unocic
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AssigneeUT-Battelle, LLC
InventorsSergei V. Kalinin, Stephen Jesse, Albina Y. Borisevich, Ondrej E. Dyck, Bobby G. Sumpter, Raymond R. Unocic
Estimating the term…
A system and method (referred to as the system) fabricates controllable atomic assemblies in two and three dimensions. The systems identify by a non-invasive imager, a local atomic structure, distribution of vacancies, and dopant atoms and modify, by a microscopic modifier, the local atomic structure, via electron beam irradiation. The systems store, by a knowledge base, cause-and-effect relationships based on a non-invasive imaging and electron scans. The systems detect, by detectors, changes in the local atomic structure induced by the electron irradiation; and fabricate, a modified atomic structure by a beam control software and feedback.
A non-transitory computer-readable medium having stored thereon a plurality of software instructions that, when executed by a processor, causes:
A system comprising
Dependencies are inferred from the claim text.