Method for integration of microelectronic components with microfluidic devices
AssigneePalo Alto Research Center Incorporated
InventorsWilliam S. Wong, Michael L. Chabinyc, Steven E. Ready, Michael A. Kneissl, Mark R. Teepe
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Abstract
A method of forming an integrated microelectronic device and a micro channel is provided. The method offers an inexpensive way of integrating devices that are usually incompatible during fabrication, a microchannel and a microelectronic structure such as an electro-optic light source, a detector or a MEMs device into a single integrated structure.
Claims26
A method for integrating an electronic device structure and microchannel onto a substrate comprising:
- forming the electronic device structure such that the electronic device structure is fixed to a substrate;
- fabricating channel features aligned to the electronic device structure on the substrate;
- forming a mold over said channel features;
- and,
- removing the channel features such that a channel to transport a fluidic sample is formed through the mold and positioned such that the electronic device structure interacts with said channel.
A method for integrating a light source and microchannel onto a transparent substrate comprising:
- forming the light source such that the light source is bonded to the transparent substrate;
- depositing an opaque pattern defining microchannels, aligned to the electronic device structure, over the transparent substrate;
- depositing a photosensitive polymer over the opaque pattern;
- transmitting radiation through the transparent substrate to cure regions of the photosensitive polymer which are not masked by the opaque pattern;
- and,
- removing the uncured regions of the photosensitive polymer to form a channel that transports a fluidic sample through the photosensitive polymer, the channel positioned such that light emitted by the source of light is directed into said channel.
A method for integrating a light source and microchannel onto a substrate comprising:
- forming the light source such that the light source is bonded to a substrate;
- fabricating channel features on the substrate;
- forming a mold over said channel features;
- removing the mold from the substrate;
- removing the channel features;
- and,
- reattaching the mold to the substrate such that a channel to transport a fluidic sample is formed through the mold and positioned such that light emitted by the source of light is directed into said channel.
Dependencies are inferred from the claim text.