H10P 70/125
With gaseous hf
Official title: {with gaseous HF}
H10P70/125 (With gaseous hf) appears on 146 US grants and 112 published applications in this corpus.
Search patents in H10P- Granted patents
- 146
- Published applications
- 112
- Assignees
- 71
- Inventors
- 341
- Latest grant
- 26 Aug 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1981 | 1 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 1 | 0 |
| 1991 | 3 | 0 |
| 1992 | 9 | 0 |
| 1993 | 3 | 0 |
| 1994 | 5 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 3 | 0 |
| 1998 | 7 | 0 |
| 1999 | 11 | 0 |
| 2000 | 9 | 0 |
| 2001 | 7 | 3 |
| 2002 | 8 | 5 |
| 2003 | 2 | 5 |
| 2004 | 4 | 2 |
| 2005 | 2 | 4 |
| 2006 | 2 | 4 |
| 2007 | 1 | 5 |
| 2008 | 0 | 2 |
| 2009 | 2 | 2 |
| 2010 | 2 | 5 |
| 2011 | 0 | 1 |
| 2012 | 1 | 1 |
| 2013 | 1 | 0 |
| 2014 | 2 | 6 |
| 2015 | 3 | 5 |
| 2016 | 5 | 6 |
| 2017 | 4 | 7 |
| 2018 | 6 | 4 |
| 2019 | 7 | 13 |
| 2020 | 5 | 3 |
| 2021 | 7 | 8 |
| 2022 | 3 | 8 |
| 2023 | 5 | 7 |
| 2024 | 6 | 2 |
| 2025 | 5 | 4 |
By publication year. Applications have been published since 2001.
Recent patents
- Apparatus for manufacturing display apparatus and method of manufacturing display apparatus26 Aug 2025US 12,400,852 B2Ltc Co., Ltd.
- In situ generation process and system19 Aug 2025US 12,394,630 B2ASM IP Holding B. V.
- Method of manufacturing a microstructure15 Jul 2025US 12,358,784 B2Memsstar Limited
- Substrate processing method17 Jun 2025US 12,334,329 B2Jusung Engineering Co., Ltd.
- Substrate processing method, substrate processing apparatus and substrate processing system25 Feb 2025US 12,237,173 B2Tokyo Electron Limited
- Method of manufacturing a microstructure23 Oct 2025US 2025/0326633 A1Memsstar Limited
- Method of manufacturing a microstructure23 Oct 2025US 2025/0326634 A1Memsstar Limited
- Substrate carrier deterioration detection and repair27 Mar 2025US 2025/0100161 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Integrated epitaxy and preclean system6 Feb 2025US 2025/0046596 A1APPLIED Materials.Inc.
- Semiconductor processing preclean methods and apparatus26 Dec 2024US 2024/0429038 A1ASM IP Holding B. V.
Most cited
By later US patents
- Plasma pre-clean module and process477US 9,299,557 B2ASM IP Holding B. V. · 2016
- Plasma pre-clean module and process474US 9,514,927 B2ASM IP Holding B. V. · 2016
- Method for removing a film on a silicon layer surface421US 5,022,961 ADainippon Screen Mfg.Co., Ltd. · 1991
- Low-temperature in-situ dry cleaning process for semiconductor wafers362US 5,089,441 ATexas Instruments Incorporated · 1992
- Low-temperature in-situ dry cleaning process for semiconductor wafer359US 5,403,434 ATexas Instruments Incorporated · 1995