Substrate carrier deterioration detection and repair
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJen-Ti WANG, Yi-Ming CHEN, Chih-Wei LIN, Cheng-Ho HUNG, Fu-Hsien LI
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Abstract
A method includes receiving a carrier, the carrier including a carrier body, a first filter, and a housing securing the first filter to the carrier body. The method further includes uninstalling the housing from the carrier, replacing the first filter with a second filter, reinstalling the housing on the carrier body, and inspecting the second filter. Inspecting the second filter includes using an automatic inspection mechanism to detect surface flatness of the second filter.
Claims20
A method, comprising:
- receiving a carrier, wherein the carrier includes a carrier body, a first filter, and a housing securing the first filter to the carrier body;
- uninstalling the housing from the carrier;
- replacing the first filter with a second filter;
- reinstalling the housing on the carrier body;
- and
- inspecting the second filter,
- wherein inspecting the second filter includes using an automatic inspection mechanism to detect surface flatness of the second filter.
A method, comprising:
- receiving a carrier from an overhead transport (OHT), wherein the carrier includes a filter;
- removing the filter from the carrier;
- installing a new filter to the carrier;
- and
- releasing the carrier to the OHT,
- wherein removing the filter and installing the new filter are performed by one or more robotic arms.
An automatic method for semiconductor manufacturing, comprising:
- receiving a carrier, wherein the carrier includes a carrier body, a housing installed onto the carrier body, and a first filter installed between the carrier body and the housing;
- uninstalling the housing from the carrier;
- removing the first filter from the carrier;
- installing a second filter into the carrier;
- reinstalling the housing on the carrier;
- and
- returning the carrier to production, wherein at least one of the uninstalling, the removing, the installing, and the reinstalling is performed by a robotic arm.
Dependencies are inferred from the claim text.