H10D 64/687
Having cavities
Official title: {having cavities, e.g. porous gate dielectrics having gasses therein}
H10D64/687 (Having cavities) appears on 127 US grants and 152 published applications in this corpus.
Search patents in H10D- Granted patents
- 127
- Published applications
- 152
- Assignees
- 63
- Inventors
- 297
- Latest grant
- 27 Jan 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1995 | 1 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 2 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 1 |
| 2003 | 1 | 1 |
| 2004 | 5 | 1 |
| 2005 | 0 | 1 |
| 2006 | 1 | 5 |
| 2007 | 0 | 2 |
| 2008 | 1 | 2 |
| 2009 | 0 | 5 |
| 2010 | 4 | 0 |
| 2011 | 3 | 0 |
| 2012 | 2 | 2 |
| 2013 | 1 | 5 |
| 2014 | 3 | 1 |
| 2015 | 2 | 7 |
| 2016 | 7 | 6 |
| 2017 | 8 | 12 |
| 2018 | 10 | 7 |
| 2019 | 9 | 12 |
| 2020 | 12 | 17 |
| 2021 | 14 | 15 |
| 2022 | 14 | 13 |
| 2023 | 10 | 16 |
| 2024 | 12 | 9 |
| 2025 | 4 | 7 |
| 2026 | 1 | 5 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Semiconductor device, biosensor, biosensor array, and logic circuit27 Jan 2026US 12,538,541 B2Ricoh Company, Ltd.
- Logic gate device9 Dec 2025US 12,495,584 B2Hon Hai Precision Industry Co., Ltd.
- Semiconductor structure and method for fabricating same25 Nov 2025US 12,484,283 B2Changxin Memory Technologies, Inc.
- Semiconductor device and method for fabricating the same22 Jul 2025US 12,368,071 B2SK hynix Inc.
- Method of forming a sealed cavity embedded in a semiconductor wafer8 Jul 2025US 12,356,698 B2Analog Devices, Inc.
- Method of forming a sealed cavity embedded in a semiconductor wafer17 Sep 2026US 2026/0282502 A1Analog Devices, Inc.
- Semiconductor device and method of manufacturing semiconductor device2 Jul 2026US 2026/0190436 A1SK hynix Inc.
- Semiconductor memory device and method of manufacturing semiconductor memory device23 Apr 2026US 2026/0113940 A1SK hynix Inc.
- Semiconductor structure and fabrication method thereof26 Mar 2026US 2026/0090007 A1Swaysure Technology Co., Ltd.
- Semiconductor device and method for manufacturing the same19 Mar 2026US 2026/0082624 A1Kabushiki Kaisha Toshiba
Most cited
By later US patents
- Flash gate air gap182US 9,136,273 B1APPLIED Materials.Inc. · 2015
- Air-gap offset spacer in FinFET structure49US 9,252,233 B2Taiwan Semiconductor Manufacturing Company.Ltd · 2016
- Etch stop for airgap protection41US 9,536,982 B1Globalfoundries Inc. · 2017
- Power device structures and methods using empty space zones40US 8,319,278 B1MaxPower Semiconductor, Inc. · 2012
- Micromachined thermal switch38US 5,463,233 AAlliedSignal Inc. · 1995