Semiconductor device, biosensor, biosensor array, and logic circuit
AssigneeRicoh Company, Ltd.
InventorsRyota Suto, Nobuto Hosono
Life of this patent
Estimating the term…
Abstract
A semiconductor device includes a first gate electrode, an insulating part, a source electrode, a drain electrode, and a contact part. The insulating part is on one surface of the first gate electrode. The source electrode is connected to the insulating part. The drain electrode is connected to the insulating part. The contact part is between the source electrode and the drain electrode and on the insulating part. The contact part contains an atomic layered material. The contact part has a second part contactable with a sample. The second surface is opposite to a first surface facing the insulating part. A surface of the insulating part, the surface facing the contact part, has an uneven structure with respect to the first gate electrode.
Claims11
A semiconductor device comprising:
- a first gate electrode;
- an insulating film on the first gate electrode;
- a source electrode connected to the insulating film;
- a drain electrode connected to the insulating film;
- and
- a contact part between the source electrode and the drain electrode and on the insulating film, the contact part containing an atomic layered material, wherein
- the contact part has a second surface contactable with a sample, the second surface being opposite to a first surface of the contact part facing the insulating film,
- a surface of the insulating film that faces the contact part has an uneven structure,
- the insulating film is between the contact part and the first gate electrode,
- the uneven structure of the insulating film is in contact with the first surface of the contact part,
- the insulating film covers an upper surface and a side surface of the first gate electrode, and
- the insulating film further includes the uneven structure on a portion that covers the side surface of the first gate electrode.
Dependencies are inferred from the claim text.