H05G 2/0086
Optical arrangements for conveying the laser beam to the plasma generation location
Official title: {Optical arrangements for conveying the laser beam to the plasma generation location}
H05G2/0086 (Optical arrangements for conveying the laser beam to the plasma generation location) appears on 283 US grants and 352 published applications in this corpus.
Search patents in H05G- Granted patents
- 283
- Published applications
- 352
- Assignees
- 59
- Inventors
- 457
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 1 | 0 |
| 1991 | 0 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 1 | 1 |
| 2003 | 1 | 1 |
| 2004 | 1 | 2 |
| 2005 | 1 | 4 |
| 2006 | 3 | 5 |
| 2007 | 1 | 4 |
| 2008 | 7 | 5 |
| 2009 | 3 | 6 |
| 2010 | 1 | 12 |
| 2011 | 5 | 8 |
| 2012 | 10 | 21 |
| 2013 | 16 | 27 |
| 2014 | 20 | 28 |
| 2015 | 20 | 24 |
| 2016 | 28 | 25 |
| 2017 | 23 | 18 |
| 2018 | 20 | 26 |
| 2019 | 23 | 13 |
| 2020 | 19 | 17 |
| 2021 | 10 | 16 |
| 2022 | 19 | 16 |
| 2023 | 12 | 18 |
| 2024 | 18 | 16 |
| 2025 | 11 | 24 |
| 2026 | 8 | 15 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Optical system and method for a radiation source6 Oct 2026US 12,757,311 B2ASML Netherlands B. V.
- Assembly for a laser-operated light source and method of use15 Sep 2026US 12,736,884 B2ASML Netherlands B. V.
- EUV light generation system and electronic device manufacturing method1 Sep 2026US 12,727,072 B2Gigaphoton Inc.
- Semiconductor system inspection tool and methods of operation14 Jul 2026US 12,684,679 B2Taiwan Semiconductor Manufacturing Company.Ltd
- Extreme ultraviolet light generation system and electronic device manufacturing method30 Jun 2026US 12,669,756 B2Gigaphoton Inc.
- Optical system, method of use, and method of fabrication1 Oct 2026US 2026/0299429 A1xLight Inc.
- Semiconductor system inspection tool and methods of operation1 Oct 2026US 2026/0304585 A1Taiwan Semiconductor Manufacturing Company.Ltd
- Euv radiation source and position-controllable mirror3 Sep 2026US 2026/0262156 A1ASML Netherlands B. V.
- X-ray analysis system with laser-driven source13 Aug 2026US 2026/0239520 A1Bruker Technologies Ltd.
- Method and laser apparatus for generating aneuv light-emitting plasma of a target material13 Aug 2026US 2026/0239521 A1TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Most cited
By later US patents
- EUV light source80US 7,164,144 B2Cymer, Inc. · 2007
- Drive laser delivery systems for EUV light source61US 7,491,954 B2Cymer, Inc. · 2009
- LPP EUV light source drive laser system57US 7,439,530 B2Cymer, Inc. · 2008
- Drive laser for EUV light source32US 7,916,388 B2Cymer, Inc. · 2011
- Method and apparatus for generating short intensive pulses of electromagnetic radiation in the wavelength range below about 100 nm30US 4,630,274 AMax-Planck-Geselschaft zur Foerderung der Wissenschaften e.V. · 1986