Drive laser delivery systems for EUV light source

An EUV light source comprising;

• a target material
• a laser device outputting a laser beam;
• a plasma chamber;
• an intermediate chamber formed with an opening to output the laser beam to the plasma chamber for interaction with the target material to create an EUV light emitting plasma;
• a beam delivery chamber having an input window for passing the laser beam from the laser device into the beam deliver chamber, the delivery chamber formed with an opening to output a laser beam to the intermediate chamber;
• and
• an optic disposed in the delivery chamber to focus the laser beam to a focal spot within the intermediate chamber.

An EUV light source comprising;

• a vessel having a laser input window;
• a laser device outputting a laser beam;
• a material disposed in the vessel for interaction with the laser beam to create an EUV light emitting plasma,
• an optic positioned in the vessel for reflecting the EUV light;
• a means for exposing the optic to a gaseous etchant at a gaseous etchant pressure sufficient to etch plasma-generated debris from the optic while exposing the input window to a substantially reduce gaseous etchant pressure.

An EUV light source comprising:

• a target material;
• at least one optic establishing a beam path with the target material;
• and
• an optical gain medium positioned along the beam path producing an amplified photon beam for interaction with the target material to produce an EUV light emitting plasma without a seed laser providing output photons to the beam path.

An EUV light source comprising:

• a target material;
• at least one optic establishing a beam path with the target material;
• an optical oscillator having an oscillator gain medium, the optical oscillator coupled with the beam path to provide an initial photon interaction with the target material;
• and
• an optical gain medium positioned along the beam path producing an amplified photon beam after the initial photon interaction, the amplified photon beam for interaction with the target material to produce an EUV light emitting plasma.

An EUV light source comprising:

• a target material positionable along a beam path to participate in a first interaction with light on the beam path;
• an optical amplifier;
• and
• at least one optic directing photons scattered from the first interaction into the optical amplifier to produce a laser beam on the beam path for a subsequent interaction with the target material to produce an EUV light emitting plasma.