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US 7,916,388 B2Granted
Drive laser for EUV light source
AssigneeCymer, Inc.
InventorAlexander N. Bykanov
Life of this patent
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Abstract
A device is described herein which may comprise an oscillator having an oscillator cavity length, Lo, and defining an oscillator path; and a multi-pass optical amplifier coupled with the oscillator to establish a combined optical cavity including the oscillator path, the combined cavity having a length, Lcombined, where Lcombined=(N+x)*Lo, where “N” is an integer and “x” is a number between 0.4 and 0.6.
Claims20
A device comprising:
- a first laser source producing a first output beam having a wavelength, λl,
- a second laser source producing a second output beam having a wavelength, λ2, with, λ1≠λ2,
- an amplifier having a gain band including λ1 and λ2, wherein said amplifier comprises a plurality of amplifier chambers positioned along a common beam path
- an optical isolator having a polarization discriminating optic substantially transmitting light having a first linear polarization and substantially blocking transmission of light having a linear polarization orthogonal to said first polarization;
- a coupling optic having a transmission-reflection ratio, TRR1, for light having a wavelength, λ1, and a transmission-reflection ratio, TRR2, for light having a wavelength, λ2, with TRR1≠TRR2, the optic coupling the first output beam and second output beam onto a common beam path through the amplifier, and wherein said coupling optic is positioned between two amplifier chambers on the common beam path.
2 more elements
A device comprising:
- a first means producing a first output beam having a wavelength, λl,
- a second means producing a second output beam having a wavelength, λ2, with, λ1≠λ2,
- an amplifying means having a gain band including λ1 and λ2, wherein said amplifying means comprises a plurality of amplifier chambers positioned along a common beam path;
- an isolator means having a polarization discriminating optic substantially transmitting light having a first linear polarization and substantially blocking transmission of light having a linear polarization orthogonal to said first polarization;
- a coupling means having a transmission-reflection ratio, TRR1, for light having a wavelength, λ1, and a transmission-reflection ratio, TRR2, for light having a wavelength, λ2, with TRR1≠TRR2, and coupling the first output beam and second output beam onto a common beam path through the amplifying means, and wherein said coupling means is positioned between two amplifier chambers on the common beam path.
2 more elements
A method comprising the steps of:
- producing a first output beam having a wavelength, λ1,
- producing a second output beam having a wavelength, λ2, with, λ1≠λ2,
- providing an amplifier having a gain band including λ1 and λ2, wherein said amplifier comprises a plurality of amplifier chambers positioned along a common beam path;
- providing an isolator having a polarization discriminating optic substantially transmitting light having a first linear polarization and substantially blocking transmission of light having a linear polarization orthogonal to said first polarization;
- coupling the first output beam and second output beam onto a common beam path through the amplifier using a coupling optic having a transmission-reflection ratio, TRR1 , for light having a wavelength, λ1, and a transmission-reflection ratio, TRR2, for light having a wavelength, λ2, with TRR1≠TRR2, and wherein said coupling optic is positioned between two amplifier chambers on the common beam path.
2 more elements
Dependencies are inferred from the claim text.