Semiconductor system inspection tool and methods of operation

A method, comprising:

• receiving, by a controller, first information corresponding to a profile of an interior surface of a vessel;
• receiving, by the controller, second information corresponding to a reference profile associated with the interior surface;
• and
• determining, by the controller, an accumulation associated with the interior surface based on the first information and the second information.

An inspection system, comprising:

• a controller configured to:
• receive first information corresponding to scans of a first portion and a second portion of an interior surface of a vessel of an extreme ultraviolet (EUV) radiation source;
• receive second information corresponding to a reference profile associated with the interior surface;
• and
• determine an accumulation associated with the interior surface based on differences between the first information and the second information.