Optical system and method for a radiation source
AssigneeASML Netherlands B.V.
InventorsAndrey Sergeevich Tychkov, Alexander Matthijs Struycken
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Abstract
An optical system for directing first and second laser pulses along an optical axis to a target to generate extreme ultraviolet radiation from said target. The optical system comprises a first optical component configured to redistribute a first laser pulse to form a shaped laser pulse having a hollow region. The optical system comprise a second optical component configured to focus the shaped laser pulse toward the target. The optical system comprises a third optical component configured to focus a second laser pulse toward the target within the hollow region of the shaped laser pulse. The first, second and third optical components are coaxially arranged on the optical axis.
Claims17
An optical system for directing first and second laser pulses along an optical axis to a target to generate extreme ultraviolet radiation from the target, the system comprising:
- a first optical component configured to redistribute the first laser pulse to form a shaped laser pulse having a hollow region;
- a second optical component configured to focus the shaped laser pulse toward the target;
- and
- a third optical component configured to focus the second laser pulse toward the target within the hollow region of the shaped laser pulse, wherein the first, second and third optical components are coaxially arranged on the optical axis.
A method of directing first and second laser pulses along an optical axis to a target to generate extreme ultraviolet radiation from the target, the method comprising:
- using a first optical component to redistribute the first laser pulse to form a shaped laser pulse having a hollow region;
- using a second optical component to focus the shaped laser pulse toward the target;
- using a third optical component to focus the second laser pulse toward the target within the hollow region of the shaped laser pulse;
- and
- coaxially arranging the first, second and third optical components on the optical axis.
Dependencies are inferred from the claim text.