Semiconductor system inspection tool and methods of operation

A method, comprising:

• receiving, by a controller and from a laser-scanning system, first information corresponding to a measured profile of an interior surface of a vessel;
• receiving, by the controller and from the laser-scanning system, second information corresponding to a reference profile of the interior surface of the vessel;
• generating, by the controller, a three-dimensional profile of the interior surface of the vessel,
• wherein generating the three-dimensional profile is based on the first information and the second information;
• and
• determining, by the controller, an amount of an accumulation of a target material based on the three-dimensional profile.

An inspection tool, comprising:

• a frame including an elongated support member,
• wherein the elongated support member is configured to be at least partially inserted into a vessel of an extreme ultraviolet (EUV) radiation source;
• a laser-scanning system supported by the frame and configured to:
• generate scans of a portion of an interior surface of the vessel;
• and
• transmit information relating to the scans to a controller;
• a motor system configured to:
• adjust one or more positions of the laser-scanning system along one or more paths relative to the frame to generate the scans;
• and
• the controller configured to:
• receive, from the laser-scanning system, the information relating to the scans;
• and
• determine an amount of an accumulation of a target material on the portion of the interior surface based on the information relating to the scans.