H01S 3/038
Electrodes
Official title: Electrodes, e.g. special shape, configuration or composition
H01S3/038 (Electrodes) appears on 631 US grants and 369 published applications in this corpus.
Search patents in H01S- Granted patents
- 631
- Published applications
- 369
- Assignees
- 213
- Inventors
- 1,013
- Latest grant
- 28 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 12 | 0 |
| 1977 | 9 | 0 |
| 1978 | 3 | 0 |
| 1979 | 3 | 0 |
| 1980 | 10 | 0 |
| 1981 | 8 | 0 |
| 1982 | 6 | 0 |
| 1983 | 10 | 0 |
| 1984 | 9 | 0 |
| 1985 | 15 | 0 |
| 1986 | 21 | 0 |
| 1987 | 27 | 0 |
| 1988 | 24 | 0 |
| 1989 | 31 | 0 |
| 1990 | 20 | 0 |
| 1991 | 12 | 0 |
| 1992 | 14 | 0 |
| 1993 | 15 | 0 |
| 1994 | 11 | 0 |
| 1995 | 8 | 0 |
| 1996 | 2 | 0 |
| 1997 | 4 | 0 |
| 1998 | 9 | 0 |
| 1999 | 6 | 0 |
| 2000 | 5 | 0 |
| 2001 | 9 | 8 |
| 2002 | 19 | 44 |
| 2003 | 43 | 23 |
| 2004 | 34 | 31 |
| 2005 | 18 | 20 |
| 2006 | 19 | 14 |
| 2007 | 23 | 14 |
| 2008 | 8 | 18 |
| 2009 | 14 | 6 |
| 2010 | 10 | 10 |
| 2011 | 9 | 2 |
| 2012 | 5 | 8 |
| 2013 | 5 | 6 |
| 2014 | 4 | 10 |
| 2015 | 9 | 18 |
| 2016 | 16 | 11 |
| 2017 | 10 | 16 |
| 2018 | 8 | 15 |
| 2019 | 16 | 10 |
| 2020 | 8 | 12 |
| 2021 | 13 | 18 |
| 2022 | 9 | 6 |
| 2023 | 7 | 8 |
| 2024 | 10 | 9 |
| 2025 | 8 | 21 |
| 2026 | 3 | 11 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Laser apparatus and electronic device manufacturing method28 Jul 2026US 12,695,264 B2Gigaphoton Inc.
- Gas laser amplifier, gas laser apparatus, EUV light generation apparatus, and EUV exposure apparatus16 Jun 2026US 12,658,664 B2Mitsubishi Electric Corporation
- Discharge electrode, method for manufacturing anode, and method for manufacturing electronic devices3 Mar 2026US 12,567,713 B2Gigaphoton Inc.
- Prolonged life laser chamber electrode and laser having same2 Dec 2025US 12,489,266 B2Cymer, Inc.
- Disc laser14 Oct 2025US 12,444,897 B2Idea Machine Development Design & Production Ltd.
- Laser chamber apparatus, laser apparatus, and electronic device manufacturing method10 Sep 2026US 2026/0269553 A1Gigaphoton Inc.
- Apparatus and method for acoustic control in a laser chamber20 Aug 2026US 2026/0246220 A1Cymer, Inc.
- Laser chamber preionizer having acoustic scattering surface13 Aug 2026US 2026/0237956 A1Cymer, Inc.
- Laser chamber, laser device, and electronic device manufacturing method16 Jul 2026US 2026/0204859 A1Gigaphoton Inc.
- Laser chamber and electronic device manufacturing method4 Jun 2026US 2026/0155616 A1Gigaphoton Inc.
Most cited
By later US patents
- Very narrow band, two chamber, high rep rate gas discharge laser system144US 6,567,450 B2Cymer, Inc. · 2003
- Very narrow band, two chamber, high rep rate gas discharge laser system136US 6,625,191 B2Cymer, Inc. · 2003
- Method of annealing implanted semiconductors by lasers108US 4,370,175 A1983
- Laser chamber with fully integrated electrode feedthrough main insulator106US 6,208,674 B1Cymer, Inc. · 2001
- Extreme repetition rate gas discharge laser with improved blower motor101US 6,477,193 B2Cymer, Inc. · 2002