Laser apparatus and electronic device manufacturing method

An electronic device manufacturing method comprising:

• generating a laser beam with a laser apparatus, the laser apparatus including
• an oscillation stage laser configured to generate and output a pulse laser beam, and
• an amplification stage laser configured to amplify the pulse laser beam output from the oscillation stage laser,
• the amplification stage laser including
• an optical resonator configured to be a transfer optical system,
• a first discharge electrode pair and a second discharge electrode pair separated from each other in a first direction intersecting an optical path of the optical resonator, the first discharge electrode pair and the second discharge electrode pair being disposed across the optical path and configured to alternately discharge, and
• a slit disposed at a transfer position of the transfer optical system and configured to limit a beam size in a second direction orthogonal to the first direction of the pulse laser beam amplified by discharge of one of the first discharge electrode pair and the second discharge electrode pair;
• outputting the laser beam to an exposure apparatus;
• and
• exposing a photosensitive substrate to the laser beam within the exposure apparatus to manufacture an electronic device.