Prolonged life laser chamber electrode and laser having same
AssigneeCymer, Inc.
InventorLeyla Ramin
Life of this patent
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Abstract
Disclosed is an electrode for a laser chamber comprising an alloy of a first metal having a first free energy of formation with fluorine greater than or equal to the free energy of formation with fluorine of copper, and a second metal having a second free energy of formation with fluorine less than the first free energy.
Claims12
An electrode for a laser chamber, the electrode being one of an upper electrode and a lower electrode between which electrical discharges cause lasing gas discharges, the electrode comprising an alloy of a first metal having a first free energy of formation with fluorine greater than or equal to the free energy of formation with fluorine of copper, and a second metal having a second free energy of formation with fluorine less than the first free energy.
An anode configured to be used in a laser discharge chamber, the anode comprising an alloy of cobalt and copper.
An electrode for a laser chamber, the electrode being one of an upper electrode and a lower electrode between which electrical discharges cause lasing gas discharges, the electrode comprising cobalt as a primary constituent and copper as a secondary constituent.
Dependencies are inferred from the claim text.