H01S 3/03
Of gas laser discharge tubes
Official title: of gas laser discharge tubes
H01S3/03 (Of gas laser discharge tubes) appears on 1,947 US grants and 912 published applications in this corpus.
Search patents in H01S- Granted patents
- 1,947
- Published applications
- 912
- Assignees
- 510
- Inventors
- 2,489
- Latest grant
- 28 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 48 | 0 |
| 1977 | 28 | 0 |
| 1978 | 21 | 0 |
| 1979 | 16 | 0 |
| 1980 | 40 | 0 |
| 1981 | 22 | 0 |
| 1982 | 27 | 0 |
| 1983 | 26 | 0 |
| 1984 | 34 | 0 |
| 1985 | 44 | 0 |
| 1986 | 55 | 0 |
| 1987 | 83 | 0 |
| 1988 | 80 | 0 |
| 1989 | 100 | 0 |
| 1990 | 73 | 0 |
| 1991 | 62 | 0 |
| 1992 | 56 | 0 |
| 1993 | 51 | 0 |
| 1994 | 60 | 0 |
| 1995 | 42 | 0 |
| 1996 | 16 | 0 |
| 1997 | 22 | 0 |
| 1998 | 35 | 0 |
| 1999 | 34 | 0 |
| 2000 | 39 | 0 |
| 2001 | 38 | 22 |
| 2002 | 50 | 75 |
| 2003 | 73 | 45 |
| 2004 | 64 | 53 |
| 2005 | 39 | 38 |
| 2006 | 37 | 32 |
| 2007 | 31 | 36 |
| 2008 | 20 | 40 |
| 2009 | 24 | 13 |
| 2010 | 28 | 29 |
| 2011 | 19 | 21 |
| 2012 | 22 | 25 |
| 2013 | 20 | 32 |
| 2014 | 30 | 43 |
| 2015 | 36 | 49 |
| 2016 | 51 | 33 |
| 2017 | 38 | 34 |
| 2018 | 25 | 38 |
| 2019 | 31 | 31 |
| 2020 | 19 | 37 |
| 2021 | 31 | 35 |
| 2022 | 29 | 29 |
| 2023 | 17 | 25 |
| 2024 | 26 | 26 |
| 2025 | 27 | 40 |
| 2026 | 8 | 31 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
- H01S 3/036Means for obtaining or maintaining the desired gas pressure within the tube783
- H01S 3/038Electrodes631
- H01S 3/034Optical devices within, or forming part of, the tube346
- H01S 3/0315Waveguide lasers271
- H01S 3/032For confinement of the discharge140
- H01S 3/031Metal vapour lasers132
- H01S 3/0305Selection of materials for the tube or the coatings thereon70
Recent patents
- Laser apparatus and electronic device manufacturing method28 Jul 2026US 12,695,264 B2Gigaphoton Inc.
- Gas laser amplifier, gas laser apparatus, EUV light generation apparatus, and EUV exposure apparatus16 Jun 2026US 12,658,664 B2Mitsubishi Electric Corporation
- Packed-bed filter for metal fluoride dust trapping in laser discharge chambers7 Apr 2026US 12,597,753 B2Cymer, Inc.
- Surface mount type optical module and attachment/detachment apparatus and method thereof3 Mar 2026US 12,566,291 B2Electronics and Telecommunications Research Institute
- Discharge electrode, method for manufacturing anode, and method for manufacturing electronic devices3 Mar 2026US 12,567,713 B2Gigaphoton Inc.
- Radiation source assembly for generating broadband radiation8 Oct 2026US 2026/0312354 A1ASML Netherlands B. V.
- Laser chamber and electronic device manufacturing method17 Sep 2026US 2026/0280217 A1Gigaphoton Inc.
- Laser chamber, gas laser device, and electronic device manufacturing method17 Sep 2026US 2026/0280218 A1Gigaphoton Inc.
- Laser chamber apparatus, laser apparatus, and electronic device manufacturing method10 Sep 2026US 2026/0269553 A1Gigaphoton Inc.
- A device and method for resonant pumping of optical gain medium in a manner orthogonal to a laser mode27 Aug 2026US 2026/0254185 A1Ramot at Tel-Aviv University Ltd.
Most cited
By later US patents
- Copper laser modulator driving assembly including a magnetic compression laser206US 5,313,481 AThe United States of America as represented by the United States Department of Energy · 1994
- Reliable modular production quality narrow-band high REP rate excimer laser171US 6,128,323 ACymer, Inc. · 2000
- Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser162US 4,959,840 ACymer Laser Technologies · 1990
- Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser160US 6,018,537 ACymer, Inc. · 2000
- Air and water cooled modulator146US 5,448,580 AThe United States of America as represented by the United States Department of Energy · 1995