Laser chamber, gas laser device, and electronic device manufacturing method

A gas laser device including an optical resonator and a laser chamber arranged such that an optical path of the optical resonator passes therethrough and configured to output laser light,

• the laser chamber including:
• a container configured to accommodate a laser gas;
• a discharge electrode configured of a pair of electrodes arranged in the container;
• a cross flow fan including a fan body configured to cause the laser gas to circulate in the container, and a rotary shaft protruding from both sides of the fan body;
• and
• a pair of first guides arranged opposite to each other in an axis direction of the rotary shaft so as to sandwich at least a part of the fan body, and configured to rectify the laser gas toward a discharge space between the pair of electrode.

An electronic device manufacturing method, comprising:

• generating laser light using a gas laser device;
• outputting the laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device,
• the gas laser device including an optical resonator and a laser chamber arranged such that an optical path of the optical resonator passes therethrough and being configured to output the laser light, and
• the laser chamber including:
• a container configured to accommodate a laser gas;
• a discharge electrode configured of a pair of electrodes arranged in the container;
• a cross flow fan including a fan body configured to cause the laser gas to circulate in the container, and a rotary shaft protruding from both sides of the fan body;
• and
• a pair of first guides arranged opposite to each other in an axis direction of the rotary shaft so as to sandwich at least a part of the fan body, and configured to rectify the laser gas toward a discharge space between the pair of electrode.