H01S 3/034
Optical devices within, or forming part of, the tube
Official title: Optical devices within, or forming part of, the tube, e.g. windows, mirrors (reflectors having variable properties or positions for initial adjustment of the resonator H01S3/086)
H01S3/034 (Optical devices within, or forming part of, the tube) appears on 346 US grants and 218 published applications in this corpus.
Search patents in H01S- Granted patents
- 346
- Published applications
- 218
- Assignees
- 162
- Inventors
- 742
- Latest grant
- 28 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 20 | 0 |
| 1977 | 10 | 0 |
| 1978 | 6 | 0 |
| 1979 | 5 | 0 |
| 1980 | 16 | 0 |
| 1981 | 4 | 0 |
| 1982 | 5 | 0 |
| 1983 | 3 | 0 |
| 1984 | 6 | 0 |
| 1985 | 3 | 0 |
| 1986 | 8 | 0 |
| 1987 | 12 | 0 |
| 1988 | 13 | 0 |
| 1989 | 10 | 0 |
| 1990 | 8 | 0 |
| 1991 | 14 | 0 |
| 1992 | 7 | 0 |
| 1993 | 8 | 0 |
| 1994 | 6 | 0 |
| 1995 | 3 | 0 |
| 1996 | 0 | 0 |
| 1997 | 2 | 0 |
| 1998 | 1 | 0 |
| 1999 | 2 | 0 |
| 2000 | 3 | 0 |
| 2001 | 4 | 3 |
| 2002 | 7 | 10 |
| 2003 | 5 | 11 |
| 2004 | 10 | 7 |
| 2005 | 8 | 3 |
| 2006 | 5 | 1 |
| 2007 | 1 | 9 |
| 2008 | 1 | 5 |
| 2009 | 5 | 3 |
| 2010 | 7 | 11 |
| 2011 | 5 | 4 |
| 2012 | 6 | 3 |
| 2013 | 4 | 6 |
| 2014 | 5 | 2 |
| 2015 | 5 | 19 |
| 2016 | 13 | 6 |
| 2017 | 6 | 8 |
| 2018 | 6 | 10 |
| 2019 | 8 | 8 |
| 2020 | 6 | 11 |
| 2021 | 9 | 14 |
| 2022 | 13 | 10 |
| 2023 | 7 | 14 |
| 2024 | 10 | 12 |
| 2025 | 11 | 16 |
| 2026 | 4 | 12 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Laser apparatus and electronic device manufacturing method28 Jul 2026US 12,695,264 B2Gigaphoton Inc.
- Packed-bed filter for metal fluoride dust trapping in laser discharge chambers7 Apr 2026US 12,597,753 B2Cymer, Inc.
- Gaseous laser systems with edge-defining element and related techniques10 Feb 2026US 12,548,968 B2Xemed LLC
- Gas laser device and electronic device manufacturing method3 Feb 2026US 12,542,412 B2Gigaphoton Inc.
- Directed gas purge to reduce dusting of excimer discharge chamber windows18 Nov 2025US 12,476,432 B2Cymer, Inc.
- Laser device and electronic device manufacturing method23 Jul 2026US 2026/0213485 A1Gigaphoton Inc.
- Gas laser device and electronic device manufacturing method9 Jul 2026US 2026/0196790 A1Gigaphoton Inc.
- Gas laser device and electronic device manufacturing method9 Jul 2026US 2026/0196791 A1Gigaphoton Inc.
- Conduit system of a radiation source and methods thereof25 Jun 2026US 2026/0177928 A1Cymer, Inc.
- Chamber apparatus for laser, laser apparatus, and electronic device manufacturing method25 Jun 2026US 2026/0180275 A1Gigaphoton Inc.
Most cited
By later US patents
- Very narrow band, two chamber, high rep rate gas discharge laser system136US 6,625,191 B2Cymer, Inc. · 2003
- Method and apparatus for in situ cleaning of excimer laser optics125US 5,001,873 AAmerican Air Liquide, Inc. · 1991
- Apparatus for, and method of, maintaining a clean window in a laser108US 5,359,620 ACymer Laser Technologies · 1994
- Fluorine control system with fluorine monitor104US 6,240,117 B1Cymer, Inc. · 2001
- Optical member made of high-purity and transparent synthetic silica glass and method for production thereof or blank thereof61US 5,410,428 AHeraeus Quarzglas GmbH & Co.KG · 1995