Gas laser device and electronic device manufacturing method
AssigneeGigaphoton Inc.
InventorKohei KUSAYANAGI
Life of this patent
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Abstract
A gas laser device includes a chamber device configured to output pulse laser light, and a pulse stretcher including a plurality of looped optical paths configured to extend a pulse width of the pulse laser light. Each of the looped optical paths includes a beam splitter on which the pulse laser light is incident and a plurality of orbit mirrors configured to sequentially reflect a part of the pulse laser light incident on the beam splitter and return the part of the pulse laser light to the beam splitter so as to be superimposed on another part of the pulse laser light. The pulse stretcher includes a unit that is detachable as separating two or more of the beam splitters from one or more of the orbit mirrors.
Claims15
A gas laser device comprising:
- a chamber device configured to output pulse laser light;
- and
- a pulse stretcher including a plurality of looped optical paths configured to extend a pulse width of the pulse laser light,
- each of the looped optical paths including a beam splitter on which the pulse laser light is incident and a plurality of orbit mirrors configured to sequentially reflect a part of the pulse laser light incident on the beam splitter and return the part of the pulse laser light to the beam splitter so as to be superimposed on another part of the pulse laser light, and
- the pulse stretcher including a unit that is detachable as separating two or more of the beam splitters from one or more of the orbit mirrors.
An electronic device manufacturing method, comprising:
- outputting pulse laser light generated by a gas laser device to an exposure apparatus;
- and
- exposing a photosensitive substrate in the exposure apparatus to the pulse laser light output to the exposure apparatus to manufacture an electronic device,
- the gas laser device including:
- a chamber device configured to output the pulse laser light;
- and
- a pulse stretcher including a plurality of looped optical paths configured to extend a pulse width of the pulse laser light,
- each of the looped optical paths including a beam splitter on which the pulse laser light is incident and a plurality of orbit mirrors configured to sequentially reflect a part of the pulse laser light incident on the beam splitter and return the part of the pulse laser light to the beam splitter so as to be superimposed on another part of the pulse laser light, and
- the pulse stretcher including a unit that is detachable as separating two or more of the beam splitters from one or more of the orbit mirrors.
Dependencies are inferred from the claim text.