H01S 3/0346
Protection of windows or mirrors against deleterious effects
Official title: {Protection of windows or mirrors against deleterious effects (cooling arrangements H01S3/0401)}
H01S3/0346 (Protection of windows or mirrors against deleterious effects) appears on 92 US grants and 67 published applications in this corpus.
Search patents in H01S- Granted patents
- 92
- Published applications
- 67
- Assignees
- 55
- Inventors
- 221
- Latest grant
- 7 Apr 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 1 | 0 |
| 1978 | 1 | 0 |
| 1979 | 0 | 0 |
| 1980 | 2 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 3 | 0 |
| 1987 | 2 | 0 |
| 1988 | 7 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 6 | 0 |
| 1992 | 0 | 0 |
| 1993 | 2 | 0 |
| 1994 | 3 | 0 |
| 1995 | 2 | 0 |
| 1996 | 0 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 2 | 0 |
| 2000 | 0 | 0 |
| 2001 | 2 | 1 |
| 2002 | 2 | 5 |
| 2003 | 4 | 7 |
| 2004 | 5 | 4 |
| 2005 | 2 | 2 |
| 2006 | 4 | 1 |
| 2007 | 0 | 0 |
| 2008 | 1 | 3 |
| 2009 | 2 | 2 |
| 2010 | 1 | 5 |
| 2011 | 2 | 2 |
| 2012 | 3 | 2 |
| 2013 | 2 | 1 |
| 2014 | 3 | 1 |
| 2015 | 2 | 3 |
| 2016 | 2 | 1 |
| 2017 | 2 | 4 |
| 2018 | 1 | 2 |
| 2019 | 2 | 0 |
| 2020 | 1 | 2 |
| 2021 | 2 | 4 |
| 2022 | 2 | 3 |
| 2023 | 2 | 5 |
| 2024 | 2 | 2 |
| 2025 | 6 | 2 |
| 2026 | 2 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Packed-bed filter for metal fluoride dust trapping in laser discharge chambers7 Apr 2026US 12,597,753 B2Cymer, Inc.
- Gaseous laser systems with edge-defining element and related techniques10 Feb 2026US 12,548,968 B2Xemed LLC
- Directed gas purge to reduce dusting of excimer discharge chamber windows18 Nov 2025US 12,476,432 B2Cymer, Inc.
- Modeling thermal effects for a laser system7 Oct 2025US 12,436,390 B2Microsoft Technology Licensing, LLC
- Chamber device, gas laser device, and electronic device manufacturing method1 Jul 2025US 12,347,995 B2Gigaphoton Inc.
- Gas laser device and electronic device manufacturing method9 Jul 2026US 2026/0196791 A1Gigaphoton Inc.
- Conduit system of a radiation source and methods thereof25 Jun 2026US 2026/0177928 A1Cymer, Inc.
- Metrology apparatus and method12 Feb 2026US 2026/0043730 A1Cymer, Inc.
- Conduit system, radiation source, lithographic apparatus, and methods thereof11 Sep 2025US 2025/0286337 A1Cymer, Inc.
- Gaseous laser systems with edge-defining element and related techniques29 May 2025US 2025/0174957 A1Xemed LLC
Most cited
By later US patents
- Very narrow band, two chamber, high rep rate gas discharge laser system136US 6,625,191 B2Cymer, Inc. · 2003
- Method and apparatus for in situ cleaning of excimer laser optics125US 5,001,873 AAmerican Air Liquide, Inc. · 1991
- Apparatus for, and method of, maintaining a clean window in a laser108US 5,359,620 ACymer Laser Technologies · 1994
- Fluorine control system with fluorine monitor104US 6,240,117 B1Cymer, Inc. · 2001
- Slab laser with enhanced lifetime31US 5,216,689 ACoherent, Inc. · 1993