Chamber device, gas laser device, and electronic device manufacturing method

A gas laser device comprising a chamber device,

• the chamber device including:
• a housing into which a laser gas is filled;
• a pair of discharge electrodes arranged to face each other at an internal space of the housing and configured to generate light from the laser gas when a voltage is applied thereto;
• a window arranged at a wall surface of the housing and configured to transmit the light therethrough;
• a first fan arranged at the internal space and configured to cause the laser gas to flow between the pair of discharge electrodes;
• a filter arranged at the internal space;
• a second fan configured to rotate together with the first fan by a drive force of a drive source of the first fan;
• a fan-side flow path arranged at the internal space and configured to cause the laser gas filtered by the filter to flow by the second fan and a part of the laser gas to flow in a direction away from the window;
• and
• a window-side flow path arranged at the internal space, communicating with the fan-side flow path, and configured to cause the laser gas flowing from the fan-side flow path by the second fan to flow toward the window.

An electronic device manufacturing method, comprising:

• generating laser light using a gas laser device including a chamber device;
• outputting the laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the laser light in the exposure apparatus to manufacture an electronic device,
• the chamber device including:
• a housing into which a laser gas is filled;
• a pair of discharge electrodes arranged to face each other at an internal space of the housing and configured to generate light from the laser gas when a voltage is applied thereto;
• a window arranged at a wall surface of the housing and configured to transmit the light therethrough;
• a first fan arranged at the internal space and configured to cause the laser gas to flow between the pair of discharge electrodes;
• a filter arranged at the internal space;
• a second fan configured to rotate together with the first fan by a drive force of a drive source of the first fan;
• a fan-side flow path arranged at the internal space and configured to cause the laser gas filtered by the filter to flow by the second fan and a part of the laser gas to flow in a direction away from the window;
• and
• a window-side flow path arranged at the internal space, communicating with the fan-side flow path, and configured to cause the laser gas flowing from the fan-side flow path by the second fan to flow toward the window.