Method and apparatus for in situ cleaning of excimer laser optics
AssigneeAmerican Air Liquide, Inc.
InventorDenis A. Rufin
Life of this patent
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Abstract
A method and apparatus for cleaning the optical elements in an excimer laser in situ. A source of high pressure carbon dioxide gas is allowed to escape through a nozzle facing the surface of the optical elements. The escaping gas expands and cools sufficiently to form a carbon dioxide ice jet. The ice jet strikes the surface of the optical elements causing cleaning of the elements by abrasion. Carbon dioxide may be removed merely by evacuation and purging of the system. Thus the mirrors are cleaned without removing them.
Claims15
A method for in situ cleaning of optical elements in a laser, comprising the steps of:
- providing a nozzle in said laser, facing each optical element;
- connecting a source of cleaning material to each nozzle;
- producing an ice jet of said cleaning material from each nozzle which strikes the corresponding optical element;
- cleaning each optical element by the impact of said ice jet thereon.
A method of in situ cleaning of optical elements in the laser, comprising the steps of:
- providing a nozzle in said laser facing each optical element;
- connecting each nozzle to a source of cleaning material;
- evacuating the part of the laser near each optical element;
- expanding said cleaning material through the nozzle, thus cooling the cleaning material;
- producing an ice jet of said cleaning material;
- impinging said ice jet on said optical elements;
- cleaning the optical elements by the impact of the ice jet;
- and
- evacuating said part of said laser in front of said optical elements.
Apparatus for in situ cleaning of optical elements of a laser comprising:
- a source of cleaning material;
- a nozzle connected to said source of cleaning material, said nozzle mounted in said laser facing an optical element;
- said nozzle producing an ice jet of said cleaning material which strikes said optical element to clean them thereby.
Dependencies are inferred from the claim text.