Gas laser device and electronic device manufacturing method

An electronic device manufacturing method, comprising:

• outputting pulse laser light generated by a gas laser device to an exposure apparatus;
• and
• exposing a photosensitive substrate in the exposure apparatus to the pulse laser light output to the exposure apparatus to manufacture an electronic device,
• the gas laser device including:
• a chamber device configured to output the pulse laser light;
• a pulse stretcher including a plurality of looped optical paths through which a pulse width of the pulse laser light is extended;
• and
• a housing including a main body portion in which the pulse stretcher is accommodated and an opening through which the pulse stretcher can be taken in and out is formed,
• each of the looped optical paths including a beam splitter on which the pulse laser light is incident, and a plurality of circulation mirrors configured to sequentially reflect a part of the pulse laser light incident on the beam splitter and return the part of the pulse laser light to the beam splitter so as to be superimposed on another part of the pulse laser light,
• the pulse stretcher including a plurality of units each including two or more optical elements including at least one of the beam splitter and the circulation mirrors, and each being able to be individually taken in and out through the opening,
• the plurality of units including a first unit and a second unit located on an opposite side of the opening with respect to the first unit, and
• a deterioration speed of at least one of the optical elements of the first unit being higher than a deterioration speed of the optical elements of the second unit.