Laser device and electronic device manufacturing method
AssigneeGigaphoton Inc.
InventorsShunya OIWA, Hirotaka MIYAMOTO
Life of this patent
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Abstract
A laser device includes a discharge-excitation-type laser oscillator configured to output pulse laser light in an ultraviolet wavelength range, a first optical pulse stretcher including a beam splitter and a plurality of concave mirrors and configured to extend a pulse width of the pulse laser light, and a relay lens including a first lens and a second lens arranged on an optical path of the pulse laser light with the pulse width extended. The first lens is a spherical plano-convex lens, and the second lens has a focal length in a longitudinal direction of a beam cross section of the pulse laser light shorter than a focal length in a transverse direction thereof.
Claims20
A laser device comprising:
- a discharge-excitation-type laser oscillator configured to output pulse laser light in an ultraviolet wavelength range;
- a first optical pulse stretcher including a beam splitter and a plurality of concave mirrors and configured to extend a pulse width of the pulse laser light;
- and
- a relay lens including a first lens and a second lens arranged on an optical path of the pulse laser light with the pulse width extended,
- the first lens being a spherical plano-convex lens, and
- the second lens having a focal length in a longitudinal direction of a beam cross section of the pulse laser light shorter than a focal length in a transverse direction thereof.
An electronic device manufacturing method, comprising:
- outputting pulse laser light from a laser device to an exposure apparatus;
- and
- exposing a photosensitive substrate to the pulse laser light in the exposure apparatus to manufacture an electronic device,
- the laser device including:
- a discharge-excitation-type laser oscillator configured to output the pulse laser light in an ultraviolet wavelength range;
- a first optical pulse stretcher including a beam splitter and a plurality of concave mirrors and configured to extend a pulse width of the pulse laser light;
- and
- a relay lens including a first lens and a second lens arranged on an optical path of the pulse laser light with the pulse width extended,
- the first lens being a spherical plano-convex lens, and
- the second lens having a focal length in a longitudinal direction of a beam cross section of the pulse laser light shorter than a focal length in a transverse direction thereof.
Dependencies are inferred from the claim text.